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• W2045930177 endingPage "355302" @default.
• W2045930177 startingPage "355302" @default.
• W2045930177 abstract "We describe a simple but reliable approach to shrink silicon nanopores with nanometer precision for potential high throughput biomolecular sensing and parallel DNA sequencing. Here, nanopore arrays on silicon membranes were fabricated by a self-limiting shrinkage of inverted pyramidal pores using dry thermal oxidation at 850 °C. The shrinkage rate of the pores with various initial sizes saturated after 4 h of oxidation. In the saturation regime, the shrinkage rate is within ± 2 nm h(-1). Oxidized pores with an average diameter of 32 nm were obtained with perfect circular shape. By careful design of the initial pore size, nanopores with diameters as small as 8 nm have been observed. Statistics of the pore width show that the shrinkage process did not broaden the pore size distribution; in most cases the distribution even decreased slightly. The progression of the oxidation and the deformation of the oxide around the pores were characterized by focused ion beam and electron microscopy. Cross-sectional imaging of the pores suggests that the initial inverted pyramidal geometry is most likely the determining factor for the self-limiting shrinkage." @default.
• W2045930177 created "2016-06-24" @default.
• W2045930177 creator A5017319114 @default.
• W2045930177 creator A5036031567 @default.
• W2045930177 creator A5056647616 @default.
• W2045930177 creator A5066647260 @default.
• W2045930177 creator A5069558279 @default.
• W2045930177 creator A5073719928 @default.
• W2045930177 date "2014-08-12" @default.
• W2045930177 modified "2023-10-16" @default.
• W2045930177 title "Oxidation of nanopores in a silicon membrane: self-limiting formation of sub-10 nm circular openings" @default.
• W2045930177 cites W1964730348 @default.
• W2045930177 cites W1981635379 @default.
• W2045930177 cites W1990357839 @default.
• W2045930177 cites W1991674727 @default.
• W2045930177 cites W1996874518 @default.
• W2045930177 cites W1998669303 @default.
• W2045930177 cites W1998733844 @default.
• W2045930177 cites W2005510971 @default.
• W2045930177 cites W2015085424 @default.
• W2045930177 cites W2031086874 @default.
• W2045930177 cites W2031378974 @default.
• W2045930177 cites W2037257326 @default.
• W2045930177 cites W2038456371 @default.
• W2045930177 cites W2061114601 @default.
• W2045930177 cites W2071273415 @default.
• W2045930177 cites W2074351432 @default.
• W2045930177 cites W2079531488 @default.
• W2045930177 cites W2085042385 @default.
• W2045930177 cites W2093914900 @default.
• W2045930177 cites W2095898308 @default.
• W2045930177 cites W2111529836 @default.
• W2045930177 cites W2127407003 @default.
• W2045930177 cites W2143132002 @default.
• W2045930177 cites W2151594165 @default.
• W2045930177 cites W2152259225 @default.
• W2045930177 cites W2169395478 @default.
• W2045930177 cites W3100726260 @default.
• W2045930177 cites W4250598489 @default.
• W2045930177 cites W4251264148 @default.
• W2045930177 cites W4256335425 @default.
• W2045930177 doi "https://doi.org/10.1088/0957-4484/25/35/355302" @default.
• W2045930177 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25116147" @default.
• W2045930177 hasPublicationYear "2014" @default.
• W2045930177 type Work @default.
• W2045930177 sameAs 2045930177 @default.
• W2045930177 citedByCount "5" @default.
• W2045930177 countsByYear W20459301772015 @default.
• W2045930177 countsByYear W20459301772016 @default.
• W2045930177 countsByYear W20459301772017 @default.
• W2045930177 countsByYear W20459301772022 @default.
• W2045930177 crossrefType "journal-article" @default.
• W2045930177 hasAuthorship W2045930177A5017319114 @default.
• W2045930177 hasAuthorship W2045930177A5036031567 @default.
• W2045930177 hasAuthorship W2045930177A5056647616 @default.
• W2045930177 hasAuthorship W2045930177A5066647260 @default.
• W2045930177 hasAuthorship W2045930177A5069558279 @default.
• W2045930177 hasAuthorship W2045930177A5073719928 @default.
• W2045930177 hasBestOaLocation W20459301772 @default.
• W2045930177 hasConcept C127413603 @default.
• W2045930177 hasConcept C141795571 @default.
• W2045930177 hasConcept C145148216 @default.
• W2045930177 hasConcept C159467904 @default.
• W2045930177 hasConcept C159985019 @default.
• W2045930177 hasConcept C161866238 @default.
• W2045930177 hasConcept C171250308 @default.
• W2045930177 hasConcept C178790620 @default.
• W2045930177 hasConcept C180145272 @default.
• W2045930177 hasConcept C185592680 @default.
• W2045930177 hasConcept C188198153 @default.
• W2045930177 hasConcept C191897082 @default.
• W2045930177 hasConcept C192562407 @default.
• W2045930177 hasConcept C26771246 @default.
• W2045930177 hasConcept C2779281663 @default.
• W2045930177 hasConcept C2779851234 @default.
• W2045930177 hasConcept C41625074 @default.
• W2045930177 hasConcept C42360764 @default.
• W2045930177 hasConcept C49040817 @default.
• W2045930177 hasConcept C544956773 @default.
• W2045930177 hasConcept C55493867 @default.
• W2045930177 hasConcept C77066764 @default.
• W2045930177 hasConcept C78519656 @default.
• W2045930177 hasConceptScore W2045930177C127413603 @default.
• W2045930177 hasConceptScore W2045930177C141795571 @default.
• W2045930177 hasConceptScore W2045930177C145148216 @default.
• W2045930177 hasConceptScore W2045930177C159467904 @default.
• W2045930177 hasConceptScore W2045930177C159985019 @default.
• W2045930177 hasConceptScore W2045930177C161866238 @default.
• W2045930177 hasConceptScore W2045930177C171250308 @default.
• W2045930177 hasConceptScore W2045930177C178790620 @default.
• W2045930177 hasConceptScore W2045930177C180145272 @default.
• W2045930177 hasConceptScore W2045930177C185592680 @default.
• W2045930177 hasConceptScore W2045930177C188198153 @default.
• W2045930177 hasConceptScore W2045930177C191897082 @default.
• W2045930177 hasConceptScore W2045930177C192562407 @default.
• W2045930177 hasConceptScore W2045930177C26771246 @default.
• W2045930177 hasConceptScore W2045930177C2779281663 @default.
• W2045930177 hasConceptScore W2045930177C2779851234 @default.

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