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- W2045981640 abstract "A preliminary investigation of the effects of implantation and annealing temperatures on implantation induced damage in HgCdTe was undertaken. Rutherford backscattering (RBS) channeling experiments were used to study the surface condition and distribution of implantation induced defects in the crystal. Secondary ion mass spectroscopy (SIMS) was used to determine the implanted boron profiles. The migration and depth distribution of defects under various thermal annealing conditions in HgCdTe implanted at room and liquid nitrogen temperatures are described." @default.
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- W2045981640 date "1982-05-01" @default.
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- W2045981640 title "Effects of implantation and annealing temperatures on implantation induced damage in HgCdTe" @default.
- W2045981640 doi "https://doi.org/10.1116/1.571729" @default.
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