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- W2046060770 abstract "We demonstrate high quality factor thin-film nanocrystalline diamond micromechanical resonators with quality factors limited by thermoelastic damping. Cantilevers, single-anchored and double-anchored double-ended tuning forks, were fabricated from 2.5 μm thick in-situ boron doped nanocrystalline diamond films deposited using hot filament chemical vapor deposition. Thermal conductivity measured by time-domain thermoreflectance resulted in 24 ± 3 W m−1 K−1 for heat transport through the thickness of the diamond film. The resonant frequencies of the fabricated resonators were 46 kHz–8 MHz and showed a maximum measured Q ≈ 86 000 at fn = 46.849 kHz. The measured Q-factors are shown to be in good agreement with the limit imposed by thermoelastic dissipation calculated using the measured thermal conductivity. The mechanical properties extracted from resonant frequency measurements indicate a Young's elastic modulus of ≈788 GPa, close to that of microcrystalline diamond." @default.
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- W2046060770 date "2014-04-14" @default.
- W2046060770 modified "2023-09-25" @default.
- W2046060770 title "High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping" @default.
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- W2046060770 doi "https://doi.org/10.1063/1.4871803" @default.
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