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• W2046091640 abstract "Abstract It is shown that spot patterns in single crystal sputtering do not necessarily arise as a consequence of focused collision sequences. Spots can be obtained if it is assumed that only the surface of a solid has regular structure. The spot width is determined by the energy distribution in the collision cascade and the potential barrier at the surface. The contribution of focusons to sputtering is negligible at low bombarding energies because of the small penetration depth of the ions. Recent experimental results indicate that the average pa thlength offocusons contributing to sputtering is extremely small even at high bombarding energies, so that the proposed sputtering mechanism should be dominant over the whole energy range. This result appears to be consistent with collision cascade theory if forward scattering is taken into account." @default.
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• W2046091640 date "1966-01-01" @default.
• W2046091640 modified "2023-09-29" @default.
• W2046091640 title "On the Mechanism of Sputtering" @default.
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• W2046091640 doi "https://doi.org/10.1002/pssb.19660160216" @default.
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