Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046100210> ?p ?o ?g. }
- W2046100210 endingPage "51" @default.
- W2046100210 startingPage "22" @default.
- W2046100210 abstract "Germanium-silicon epitaxial layers are now being applied in a variety of heterojunction devices on silicon substrates. In this paper, I review the growth of these structures by chemical vapor deposition. While a wide variety of growth conditions have been used, there is a general trend toward low temperature processes where surface chemical reactions play a dominant role. The present understanding of the decomposition of various reactants is therefore reviewed, followed by a discussion of the implications for growth kinetics. The introduction of defects during growth will also be discussed. Finally a summary of recent device developments will be given." @default.
- W2046100210 created "2016-06-24" @default.
- W2046100210 creator A5084600459 @default.
- W2046100210 date "1993-02-01" @default.
- W2046100210 modified "2023-09-23" @default.
- W2046100210 title "Growth of epitaxial germanium-silicon heterostructures by chemical vapour deposition" @default.
- W2046100210 cites W1509671657 @default.
- W2046100210 cites W1811004043 @default.
- W2046100210 cites W1853589413 @default.
- W2046100210 cites W1965527387 @default.
- W2046100210 cites W1965931303 @default.
- W2046100210 cites W1966771346 @default.
- W2046100210 cites W1966900087 @default.
- W2046100210 cites W1969909224 @default.
- W2046100210 cites W1970590829 @default.
- W2046100210 cites W1972881177 @default.
- W2046100210 cites W1973694208 @default.
- W2046100210 cites W1974720061 @default.
- W2046100210 cites W1974900351 @default.
- W2046100210 cites W1975287034 @default.
- W2046100210 cites W1976252755 @default.
- W2046100210 cites W1977726569 @default.
- W2046100210 cites W1978355978 @default.
- W2046100210 cites W1978546961 @default.
- W2046100210 cites W1978948640 @default.
- W2046100210 cites W1980379784 @default.
- W2046100210 cites W1981688553 @default.
- W2046100210 cites W1982153874 @default.
- W2046100210 cites W1982474260 @default.
- W2046100210 cites W1983202720 @default.
- W2046100210 cites W1984217971 @default.
- W2046100210 cites W1988438523 @default.
- W2046100210 cites W1988873342 @default.
- W2046100210 cites W1988955645 @default.
- W2046100210 cites W1988961582 @default.
- W2046100210 cites W1989397521 @default.
- W2046100210 cites W1989980133 @default.
- W2046100210 cites W1990372417 @default.
- W2046100210 cites W1991057371 @default.
- W2046100210 cites W1991085497 @default.
- W2046100210 cites W1991224503 @default.
- W2046100210 cites W1991286052 @default.
- W2046100210 cites W1991401244 @default.
- W2046100210 cites W1992276925 @default.
- W2046100210 cites W1993021334 @default.
- W2046100210 cites W1993712129 @default.
- W2046100210 cites W1993797465 @default.
- W2046100210 cites W1994644634 @default.
- W2046100210 cites W1997022314 @default.
- W2046100210 cites W1999164315 @default.
- W2046100210 cites W2004047505 @default.
- W2046100210 cites W2006470848 @default.
- W2046100210 cites W2007097955 @default.
- W2046100210 cites W2007627508 @default.
- W2046100210 cites W2008659112 @default.
- W2046100210 cites W2008916834 @default.
- W2046100210 cites W2011274608 @default.
- W2046100210 cites W2013882891 @default.
- W2046100210 cites W2014099523 @default.
- W2046100210 cites W2016267664 @default.
- W2046100210 cites W2017350726 @default.
- W2046100210 cites W2018577436 @default.
- W2046100210 cites W2019067876 @default.
- W2046100210 cites W2020367618 @default.
- W2046100210 cites W2021571281 @default.
- W2046100210 cites W2025388210 @default.
- W2046100210 cites W2026854929 @default.
- W2046100210 cites W2027468610 @default.
- W2046100210 cites W2027696895 @default.
- W2046100210 cites W2027916479 @default.
- W2046100210 cites W2029629052 @default.
- W2046100210 cites W2031276844 @default.
- W2046100210 cites W2031640916 @default.
- W2046100210 cites W2032959440 @default.
- W2046100210 cites W2035685707 @default.
- W2046100210 cites W2035725265 @default.
- W2046100210 cites W2036741761 @default.
- W2046100210 cites W2037749999 @default.
- W2046100210 cites W2037896537 @default.
- W2046100210 cites W2038179534 @default.
- W2046100210 cites W2038804379 @default.
- W2046100210 cites W2039300797 @default.
- W2046100210 cites W2042623839 @default.
- W2046100210 cites W2043858316 @default.
- W2046100210 cites W2043971006 @default.
- W2046100210 cites W2044100850 @default.
- W2046100210 cites W2044577428 @default.
- W2046100210 cites W2044938692 @default.
- W2046100210 cites W2046274613 @default.
- W2046100210 cites W2046393487 @default.
- W2046100210 cites W2047227125 @default.
- W2046100210 cites W2048025416 @default.
- W2046100210 cites W2048625846 @default.
- W2046100210 cites W2054307419 @default.
- W2046100210 cites W2055413650 @default.
- W2046100210 cites W2055701216 @default.
- W2046100210 cites W2057875422 @default.
- W2046100210 cites W2059978376 @default.