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- W2046118218 abstract "The influence of alkali metal implantations in silicon on the negative secondary ion emission is studied. It is observed that the effect of negative ion signal enhancement decreases with increasing ionization potential from Cs to Na but depends lineary on the alkali volume concentration for all alkali metals. Natrium exhibits a somewhat deviating behaviour, which can be explained by its comparable high ionization potential. Es wird der Einfluß von Alkalimetallimplantationen auf die negative Sekundärionenemission in Silizium untersucht. Der Effekt der Erhöhung der Ausbeute an negativen Ionen verringert sich mit wachsendem Ionisationspotential von Cs zu Na, hängt aber linear von der Alkalivolumenkonzentration fur alle Alkalimetalle ab. Natrium zeigt ein etwas abweichendes Verhalten, was mit seinem relativ hohen Ionisationspotential erklärt werden kann." @default.
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- W2046118218 date "1984-07-16" @default.
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- W2046118218 title "The influence of alkali atoms implanted in silicon on the negative secondary ion emission" @default.
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