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- W2046126812 endingPage "4604" @default.
- W2046126812 startingPage "4601" @default.
- W2046126812 abstract "The effects of phosphoric acid addition on slurry for chemical–mechanical planarization (CMP) of copper and tantalum nitride were investigated. It is generally known that the slurry for copper CMP consists of alumina or colloidal silica as an abrasive, organic acid as a complexing agent, an oxidizing agent, a film forming agent, a pH control agent and additives. Hydrogen peroxide (H2O2) is one of the materials that are commonly used as an oxidizing agent in copper CMP. However, hydrogen peroxide needs some stabilizers to prevent decomposition. We evaluated phosphoric acid (H3PO4) as an accelerator of the tantalum nitride CMP as well as process a stabilizer of the hydrogen peroxide. We also estimated dispersion stability and zeta potential of the abrasive slurry with the contents of phosphoric acid. An acceleration of the tantalum nitride CMP was verified through the electrochemical test. This approach may be useful for the development of the second step copper CMP slurry or in general stabilization of hydrogen peroxide in abrasive slurry." @default.
- W2046126812 created "2016-06-24" @default.
- W2046126812 creator A5008014896 @default.
- W2046126812 creator A5013163283 @default.
- W2046126812 creator A5067520031 @default.
- W2046126812 creator A5079944658 @default.
- W2046126812 date "2003-11-01" @default.
- W2046126812 modified "2023-10-03" @default.
- W2046126812 title "Effects of phosphoric acid stabilizer on copper and tantalum nitride CMP" @default.
- W2046126812 cites W2091989934 @default.
- W2046126812 cites W643377991 @default.
- W2046126812 doi "https://doi.org/10.1016/s0167-577x(03)00368-9" @default.
- W2046126812 hasPublicationYear "2003" @default.
- W2046126812 type Work @default.
- W2046126812 sameAs 2046126812 @default.
- W2046126812 citedByCount "23" @default.
- W2046126812 countsByYear W20461268122012 @default.
- W2046126812 countsByYear W20461268122013 @default.
- W2046126812 countsByYear W20461268122014 @default.
- W2046126812 countsByYear W20461268122016 @default.
- W2046126812 countsByYear W20461268122018 @default.
- W2046126812 countsByYear W20461268122020 @default.
- W2046126812 countsByYear W20461268122021 @default.
- W2046126812 countsByYear W20461268122022 @default.
- W2046126812 countsByYear W20461268122023 @default.
- W2046126812 crossrefType "journal-article" @default.
- W2046126812 hasAuthorship W2046126812A5008014896 @default.
- W2046126812 hasAuthorship W2046126812A5013163283 @default.
- W2046126812 hasAuthorship W2046126812A5067520031 @default.
- W2046126812 hasAuthorship W2046126812A5079944658 @default.
- W2046126812 hasConcept C120665830 @default.
- W2046126812 hasConcept C121332964 @default.
- W2046126812 hasConcept C127413603 @default.
- W2046126812 hasConcept C138113353 @default.
- W2046126812 hasConcept C145889102 @default.
- W2046126812 hasConcept C159985019 @default.
- W2046126812 hasConcept C177562468 @default.
- W2046126812 hasConcept C178790620 @default.
- W2046126812 hasConcept C179104552 @default.
- W2046126812 hasConcept C180088628 @default.
- W2046126812 hasConcept C185592680 @default.
- W2046126812 hasConcept C191897082 @default.
- W2046126812 hasConcept C192562407 @default.
- W2046126812 hasConcept C2776622989 @default.
- W2046126812 hasConcept C2778112282 @default.
- W2046126812 hasConcept C42360764 @default.
- W2046126812 hasConcept C514619126 @default.
- W2046126812 hasConcept C533411734 @default.
- W2046126812 hasConcept C544778455 @default.
- W2046126812 hasConcept C77176794 @default.
- W2046126812 hasConcept C94293008 @default.
- W2046126812 hasConceptScore W2046126812C120665830 @default.
- W2046126812 hasConceptScore W2046126812C121332964 @default.
- W2046126812 hasConceptScore W2046126812C127413603 @default.
- W2046126812 hasConceptScore W2046126812C138113353 @default.
- W2046126812 hasConceptScore W2046126812C145889102 @default.
- W2046126812 hasConceptScore W2046126812C159985019 @default.
- W2046126812 hasConceptScore W2046126812C177562468 @default.
- W2046126812 hasConceptScore W2046126812C178790620 @default.
- W2046126812 hasConceptScore W2046126812C179104552 @default.
- W2046126812 hasConceptScore W2046126812C180088628 @default.
- W2046126812 hasConceptScore W2046126812C185592680 @default.
- W2046126812 hasConceptScore W2046126812C191897082 @default.
- W2046126812 hasConceptScore W2046126812C192562407 @default.
- W2046126812 hasConceptScore W2046126812C2776622989 @default.
- W2046126812 hasConceptScore W2046126812C2778112282 @default.
- W2046126812 hasConceptScore W2046126812C42360764 @default.
- W2046126812 hasConceptScore W2046126812C514619126 @default.
- W2046126812 hasConceptScore W2046126812C533411734 @default.
- W2046126812 hasConceptScore W2046126812C544778455 @default.
- W2046126812 hasConceptScore W2046126812C77176794 @default.
- W2046126812 hasConceptScore W2046126812C94293008 @default.
- W2046126812 hasIssue "29" @default.
- W2046126812 hasLocation W20461268121 @default.
- W2046126812 hasOpenAccess W2046126812 @default.
- W2046126812 hasPrimaryLocation W20461268121 @default.
- W2046126812 hasRelatedWork W2024016116 @default.
- W2046126812 hasRelatedWork W2046126812 @default.
- W2046126812 hasRelatedWork W2081946737 @default.
- W2046126812 hasRelatedWork W2094398328 @default.
- W2046126812 hasRelatedWork W2251549685 @default.
- W2046126812 hasRelatedWork W2378655108 @default.
- W2046126812 hasRelatedWork W322030300 @default.
- W2046126812 hasRelatedWork W4200163587 @default.
- W2046126812 hasRelatedWork W4232153426 @default.
- W2046126812 hasRelatedWork W63936304 @default.
- W2046126812 hasVolume "57" @default.
- W2046126812 isParatext "false" @default.
- W2046126812 isRetracted "false" @default.
- W2046126812 magId "2046126812" @default.
- W2046126812 workType "article" @default.