FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046151875> ?p ?o ?g. }

• W2046151875 endingPage "1124" @default.
• W2046151875 startingPage "1116" @default.
• W2046151875 abstract "A planar GaAs integrated circuit (IC) fabrication technology capable of LSI complexity has been developed. The circuit and fabrication approaches were chosen to satisfy LSI requirements for high yield, high density, and low power. This technology utilizes Schottky-diode FET logic (SDFL) incorporating both high-speed switching diodes and 1-µ m GaAs MESFET's. Circuits are fabricated directly on semi-insulating GaAs using multiple localized implantations. Rapid progress in the development of this technology has already led to the successful demonstration of high-speed ( <tex xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>tau_{d} sim 100</tex> ps) low-power (∼500 µW/gate) GaAs MSI (∼60-100 gates) circuits. Extension of the current MSI technology to the LSI/VLSI domain will depend critically on device yield which will be dictated by the GaAs material properties and by the fabrication processes used. The purpose of this paper is to describe a GaAs IC process technology which combines advanced planar device and multilevel interconnect structures with several LSI compatible processes including multiple localized ion implantations, reduction photolithography, plasma etching, reactive ion etching, and ion milling." @default.
• W2046151875 created "2016-06-24" @default.
• W2046151875 creator A5006845392 @default.
• W2046151875 creator A5012663063 @default.
• W2046151875 creator A5014080195 @default.
• W2046151875 creator A5032632279 @default.
• W2046151875 creator A5064519369 @default.
• W2046151875 date "1980-06-01" @default.
• W2046151875 modified "2023-10-16" @default.
• W2046151875 title "LSI processing technology for planar GaAs integrated circuits" @default.
• W2046151875 cites W1557847626 @default.
• W2046151875 cites W2005322062 @default.
• W2046151875 cites W2009494527 @default.
• W2046151875 cites W2027455885 @default.
• W2046151875 cites W2132571470 @default.
• W2046151875 cites W21590206 @default.
• W2046151875 cites W2462514347 @default.
• W2046151875 cites W2578045866 @default.
• W2046151875 doi "https://doi.org/10.1109/t-ed.1980.19994" @default.
• W2046151875 hasPublicationYear "1980" @default.
• W2046151875 type Work @default.
• W2046151875 sameAs 2046151875 @default.
• W2046151875 citedByCount "63" @default.
• W2046151875 countsByYear W20461518752020 @default.
• W2046151875 crossrefType "journal-article" @default.
• W2046151875 hasAuthorship W2046151875A5006845392 @default.
• W2046151875 hasAuthorship W2046151875A5012663063 @default.
• W2046151875 hasAuthorship W2046151875A5014080195 @default.
• W2046151875 hasAuthorship W2046151875A5032632279 @default.
• W2046151875 hasAuthorship W2046151875A5064519369 @default.
• W2046151875 hasConcept C100460472 @default.
• W2046151875 hasConcept C105487726 @default.
• W2046151875 hasConcept C119599485 @default.
• W2046151875 hasConcept C121684516 @default.
• W2046151875 hasConcept C127413603 @default.
• W2046151875 hasConcept C131017901 @default.
• W2046151875 hasConcept C134123091 @default.
• W2046151875 hasConcept C134146338 @default.
• W2046151875 hasConcept C134786449 @default.
• W2046151875 hasConcept C136525101 @default.
• W2046151875 hasConcept C142724271 @default.
• W2046151875 hasConcept C145598152 @default.
• W2046151875 hasConcept C14580979 @default.
• W2046151875 hasConcept C165801399 @default.
• W2046151875 hasConcept C171250308 @default.
• W2046151875 hasConcept C172385210 @default.
• W2046151875 hasConcept C192562407 @default.
• W2046151875 hasConcept C204787440 @default.
• W2046151875 hasConcept C205200001 @default.
• W2046151875 hasConcept C24326235 @default.
• W2046151875 hasConcept C2779227376 @default.
• W2046151875 hasConcept C41008148 @default.
• W2046151875 hasConcept C49040817 @default.
• W2046151875 hasConcept C510052550 @default.
• W2046151875 hasConcept C530198007 @default.
• W2046151875 hasConcept C71924100 @default.
• W2046151875 hasConcept C78434282 @default.
• W2046151875 hasConceptScore W2046151875C100460472 @default.
• W2046151875 hasConceptScore W2046151875C105487726 @default.
• W2046151875 hasConceptScore W2046151875C119599485 @default.
• W2046151875 hasConceptScore W2046151875C121684516 @default.
• W2046151875 hasConceptScore W2046151875C127413603 @default.
• W2046151875 hasConceptScore W2046151875C131017901 @default.
• W2046151875 hasConceptScore W2046151875C134123091 @default.
• W2046151875 hasConceptScore W2046151875C134146338 @default.
• W2046151875 hasConceptScore W2046151875C134786449 @default.
• W2046151875 hasConceptScore W2046151875C136525101 @default.
• W2046151875 hasConceptScore W2046151875C142724271 @default.
• W2046151875 hasConceptScore W2046151875C145598152 @default.
• W2046151875 hasConceptScore W2046151875C14580979 @default.
• W2046151875 hasConceptScore W2046151875C165801399 @default.
• W2046151875 hasConceptScore W2046151875C171250308 @default.
• W2046151875 hasConceptScore W2046151875C172385210 @default.
• W2046151875 hasConceptScore W2046151875C192562407 @default.
• W2046151875 hasConceptScore W2046151875C204787440 @default.
• W2046151875 hasConceptScore W2046151875C205200001 @default.
• W2046151875 hasConceptScore W2046151875C24326235 @default.
• W2046151875 hasConceptScore W2046151875C2779227376 @default.
• W2046151875 hasConceptScore W2046151875C41008148 @default.
• W2046151875 hasConceptScore W2046151875C49040817 @default.
• W2046151875 hasConceptScore W2046151875C510052550 @default.
• W2046151875 hasConceptScore W2046151875C530198007 @default.
• W2046151875 hasConceptScore W2046151875C71924100 @default.
• W2046151875 hasConceptScore W2046151875C78434282 @default.
• W2046151875 hasIssue "6" @default.
• W2046151875 hasLocation W20461518751 @default.
• W2046151875 hasOpenAccess W2046151875 @default.
• W2046151875 hasPrimaryLocation W20461518751 @default.
• W2046151875 hasRelatedWork W1966714478 @default.
• W2046151875 hasRelatedWork W1969811370 @default.
• W2046151875 hasRelatedWork W1983543701 @default.
• W2046151875 hasRelatedWork W1990427537 @default.
• W2046151875 hasRelatedWork W1997583948 @default.
• W2046151875 hasRelatedWork W1999872294 @default.
• W2046151875 hasRelatedWork W2067015663 @default.
• W2046151875 hasRelatedWork W2070785279 @default.
• W2046151875 hasRelatedWork W2159088696 @default.
• W2046151875 hasRelatedWork W3006292918 @default.

• next