FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046167020> ?p ?o ?g. }

• W2046167020 endingPage "033707" @default.
• W2046167020 startingPage "033707" @default.
• W2046167020 abstract "Sheet resistance, carrier mobility, and sheet carrier density are important parameters in semiconductor production, and it is therefore important to be able to rapidly and accurately measure these parameters even on small samples or pads. The interpretation of four-point probe measurements on small pads is non-trivial. In this paper we discuss how conformal mapping can be used to evaluate theoretically expected measurement values on small pads. Theoretical values calculated from analytical mappings of simple geometries are compared to the values found from the numerical conformal mapping of a square onto the infinite half-plane, where well-established solutions are known. Hall effect measurements are performed to show, experimentally, that it is possible to measure Hall mobility in less than one minute on squares as small as 70 × 70 μm2 with a deviation of ±6.5% on a 1σ level from accurate reference measurements, when only small sheet resistance variations are present. For samples with a sheet resistance variation of more than 5%, a more time consuming method must be used. Here, the theoretically expected measurement values are computed based on the sheet resistance variation using a finite element method. This more accurate method has an experimental repeatability of ±1.6% even on inhomogeneous samples." @default.
• W2046167020 created "2016-06-24" @default.
• W2046167020 creator A5029989684 @default.
• W2046167020 creator A5049003157 @default.
• W2046167020 creator A5052415173 @default.
• W2046167020 creator A5063647251 @default.
• W2046167020 creator A5088609274 @default.
• W2046167020 creator A5089737511 @default.
• W2046167020 date "2011-08-01" @default.
• W2046167020 modified "2023-09-30" @default.
• W2046167020 title "Fast micro Hall effect measurements on small pads" @default.
• W2046167020 cites W1964513943 @default.
• W2046167020 cites W1976670715 @default.
• W2046167020 cites W1986127213 @default.
• W2046167020 cites W1999061032 @default.
• W2046167020 cites W2003412364 @default.
• W2046167020 cites W2035637975 @default.
• W2046167020 cites W2048998836 @default.
• W2046167020 cites W2061104590 @default.
• W2046167020 cites W2064494508 @default.
• W2046167020 cites W2136461005 @default.
• W2046167020 doi "https://doi.org/10.1063/1.3610505" @default.
• W2046167020 hasPublicationYear "2011" @default.
• W2046167020 type Work @default.
• W2046167020 sameAs 2046167020 @default.
• W2046167020 citedByCount "8" @default.
• W2046167020 countsByYear W20461670202013 @default.
• W2046167020 countsByYear W20461670202014 @default.
• W2046167020 countsByYear W20461670202017 @default.
• W2046167020 countsByYear W20461670202018 @default.
• W2046167020 countsByYear W20461670202021 @default.
• W2046167020 countsByYear W20461670202022 @default.
• W2046167020 crossrefType "journal-article" @default.
• W2046167020 hasAuthorship W2046167020A5029989684 @default.
• W2046167020 hasAuthorship W2046167020A5049003157 @default.
• W2046167020 hasAuthorship W2046167020A5052415173 @default.
• W2046167020 hasAuthorship W2046167020A5063647251 @default.
• W2046167020 hasAuthorship W2046167020A5088609274 @default.
• W2046167020 hasAuthorship W2046167020A5089737511 @default.
• W2046167020 hasBestOaLocation W20461670202 @default.
• W2046167020 hasConcept C105795698 @default.
• W2046167020 hasConcept C108225325 @default.
• W2046167020 hasConcept C121332964 @default.
• W2046167020 hasConcept C134112204 @default.
• W2046167020 hasConcept C134306372 @default.
• W2046167020 hasConcept C135628077 @default.
• W2046167020 hasConcept C154020017 @default.
• W2046167020 hasConcept C159985019 @default.
• W2046167020 hasConcept C17825722 @default.
• W2046167020 hasConcept C192562407 @default.
• W2046167020 hasConcept C207521374 @default.
• W2046167020 hasConcept C2524010 @default.
• W2046167020 hasConcept C2779227376 @default.
• W2046167020 hasConcept C2780009758 @default.
• W2046167020 hasConcept C28719098 @default.
• W2046167020 hasConcept C30475298 @default.
• W2046167020 hasConcept C33923547 @default.
• W2046167020 hasConcept C41008148 @default.
• W2046167020 hasConcept C49040817 @default.
• W2046167020 hasConcept C57863236 @default.
• W2046167020 hasConcept C62520636 @default.
• W2046167020 hasConcept C66825105 @default.
• W2046167020 hasConcept C69990965 @default.
• W2046167020 hasConcept C77088390 @default.
• W2046167020 hasConcept C97355855 @default.
• W2046167020 hasConcept C98214594 @default.
• W2046167020 hasConceptScore W2046167020C105795698 @default.
• W2046167020 hasConceptScore W2046167020C108225325 @default.
• W2046167020 hasConceptScore W2046167020C121332964 @default.
• W2046167020 hasConceptScore W2046167020C134112204 @default.
• W2046167020 hasConceptScore W2046167020C134306372 @default.
• W2046167020 hasConceptScore W2046167020C135628077 @default.
• W2046167020 hasConceptScore W2046167020C154020017 @default.
• W2046167020 hasConceptScore W2046167020C159985019 @default.
• W2046167020 hasConceptScore W2046167020C17825722 @default.
• W2046167020 hasConceptScore W2046167020C192562407 @default.
• W2046167020 hasConceptScore W2046167020C207521374 @default.
• W2046167020 hasConceptScore W2046167020C2524010 @default.
• W2046167020 hasConceptScore W2046167020C2779227376 @default.
• W2046167020 hasConceptScore W2046167020C2780009758 @default.
• W2046167020 hasConceptScore W2046167020C28719098 @default.
• W2046167020 hasConceptScore W2046167020C30475298 @default.
• W2046167020 hasConceptScore W2046167020C33923547 @default.
• W2046167020 hasConceptScore W2046167020C41008148 @default.
• W2046167020 hasConceptScore W2046167020C49040817 @default.
• W2046167020 hasConceptScore W2046167020C57863236 @default.
• W2046167020 hasConceptScore W2046167020C62520636 @default.
• W2046167020 hasConceptScore W2046167020C66825105 @default.
• W2046167020 hasConceptScore W2046167020C69990965 @default.
• W2046167020 hasConceptScore W2046167020C77088390 @default.
• W2046167020 hasConceptScore W2046167020C97355855 @default.
• W2046167020 hasConceptScore W2046167020C98214594 @default.
• W2046167020 hasIssue "3" @default.
• W2046167020 hasLocation W20461670201 @default.
• W2046167020 hasLocation W20461670202 @default.
• W2046167020 hasOpenAccess W2046167020 @default.
• W2046167020 hasPrimaryLocation W20461670201 @default.
• W2046167020 hasRelatedWork W1528858783 @default.

• next