Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046264839> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2046264839 endingPage "G370" @default.
- W2046264839 startingPage "G370" @default.
- W2046264839 abstract "In this study, the effect of course surface roughness of abrasive particles on the removal rate in chemical mechanical polishing is analyzed. The mechanical contact theory is used and the relationship between the polishing rate and properties of pad, wafer, and abrasive particle is studied. Particular attention is given to the case where abrasives are compact bumpy particles and the pad is soft. It is found that the polishing rate depends on the size of abrasive particle bumps. The penetration depth of bumpy particles is larger than that of the spherical particles of the same diameter; the removal rate by the abrasive wear mechanism for bumpy particles, however, is less than the corresponding smooth spherical particles. © 2002 The Electrochemical Society. All rights reserved." @default.
- W2046264839 created "2016-06-24" @default.
- W2046264839 creator A5031241305 @default.
- W2046264839 creator A5058552303 @default.
- W2046264839 date "2002-01-01" @default.
- W2046264839 modified "2023-09-27" @default.
- W2046264839 title "Modeling the Effect of Bumpy Abrasive Particles on Chemical Mechanical Polishing" @default.
- W2046264839 cites W1972207333 @default.
- W2046264839 cites W1989689327 @default.
- W2046264839 cites W2013479077 @default.
- W2046264839 cites W2016729254 @default.
- W2046264839 cites W2017046665 @default.
- W2046264839 cites W2066247223 @default.
- W2046264839 cites W2091936181 @default.
- W2046264839 cites W2091989934 @default.
- W2046264839 cites W2146202010 @default.
- W2046264839 doi "https://doi.org/10.1149/1.1479162" @default.
- W2046264839 hasPublicationYear "2002" @default.
- W2046264839 type Work @default.
- W2046264839 sameAs 2046264839 @default.
- W2046264839 citedByCount "33" @default.
- W2046264839 countsByYear W20462648392013 @default.
- W2046264839 countsByYear W20462648392015 @default.
- W2046264839 countsByYear W20462648392021 @default.
- W2046264839 crossrefType "journal-article" @default.
- W2046264839 hasAuthorship W2046264839A5031241305 @default.
- W2046264839 hasAuthorship W2046264839A5058552303 @default.
- W2046264839 hasConcept C107365816 @default.
- W2046264839 hasConcept C111368507 @default.
- W2046264839 hasConcept C127313418 @default.
- W2046264839 hasConcept C127413603 @default.
- W2046264839 hasConcept C138113353 @default.
- W2046264839 hasConcept C155672457 @default.
- W2046264839 hasConcept C159985019 @default.
- W2046264839 hasConcept C160671074 @default.
- W2046264839 hasConcept C171250308 @default.
- W2046264839 hasConcept C180088628 @default.
- W2046264839 hasConcept C187530423 @default.
- W2046264839 hasConcept C191897082 @default.
- W2046264839 hasConcept C192562407 @default.
- W2046264839 hasConcept C2778517922 @default.
- W2046264839 hasConcept C2780957350 @default.
- W2046264839 hasConcept C42360764 @default.
- W2046264839 hasConcept C42475967 @default.
- W2046264839 hasConcept C71039073 @default.
- W2046264839 hasConcept C80107235 @default.
- W2046264839 hasConceptScore W2046264839C107365816 @default.
- W2046264839 hasConceptScore W2046264839C111368507 @default.
- W2046264839 hasConceptScore W2046264839C127313418 @default.
- W2046264839 hasConceptScore W2046264839C127413603 @default.
- W2046264839 hasConceptScore W2046264839C138113353 @default.
- W2046264839 hasConceptScore W2046264839C155672457 @default.
- W2046264839 hasConceptScore W2046264839C159985019 @default.
- W2046264839 hasConceptScore W2046264839C160671074 @default.
- W2046264839 hasConceptScore W2046264839C171250308 @default.
- W2046264839 hasConceptScore W2046264839C180088628 @default.
- W2046264839 hasConceptScore W2046264839C187530423 @default.
- W2046264839 hasConceptScore W2046264839C191897082 @default.
- W2046264839 hasConceptScore W2046264839C192562407 @default.
- W2046264839 hasConceptScore W2046264839C2778517922 @default.
- W2046264839 hasConceptScore W2046264839C2780957350 @default.
- W2046264839 hasConceptScore W2046264839C42360764 @default.
- W2046264839 hasConceptScore W2046264839C42475967 @default.
- W2046264839 hasConceptScore W2046264839C71039073 @default.
- W2046264839 hasConceptScore W2046264839C80107235 @default.
- W2046264839 hasIssue "7" @default.
- W2046264839 hasLocation W20462648391 @default.
- W2046264839 hasOpenAccess W2046264839 @default.
- W2046264839 hasPrimaryLocation W20462648391 @default.
- W2046264839 hasRelatedWork W1997230271 @default.
- W2046264839 hasRelatedWork W2084811456 @default.
- W2046264839 hasRelatedWork W2100217190 @default.
- W2046264839 hasRelatedWork W2128268971 @default.
- W2046264839 hasRelatedWork W2228895525 @default.
- W2046264839 hasRelatedWork W2356978086 @default.
- W2046264839 hasRelatedWork W2921131276 @default.
- W2046264839 hasRelatedWork W3167916481 @default.
- W2046264839 hasRelatedWork W4213158168 @default.
- W2046264839 hasRelatedWork W586105622 @default.
- W2046264839 hasVolume "149" @default.
- W2046264839 isParatext "false" @default.
- W2046264839 isRetracted "false" @default.
- W2046264839 magId "2046264839" @default.
- W2046264839 workType "article" @default.