FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046288766> ?p ?o ?g. }

• W2046288766 endingPage "685" @default.
• W2046288766 startingPage "680" @default.
• W2046288766 abstract "Heavy ion elastic recoil detection (ERD) is shown to be a powerful tool for studying the deposition and processing of Si-rich silica films deposited by plasma enhanced chemical vapour deposition (PECVD). Such films are of interest for the fabrication of SiO2 layers containing silicon nanocrystals and are commonly deposited using SiH4 and N2O source gases. Heavy ion ERD reveals that as-deposited films can contain high concentrations of N, potentially reducing the efficacy of nanocrystal formation due to competing reactions between Si and N. This is believed to explain why high excess-Si concentrations are required to produce luminescent nanocrystals in such layers. Analysis of samples following high temperature (1200 °C) annealing also reveal the loss of H from the layers and highlight an experimental artefact associated with such high temperature processing." @default.
• W2046288766 created "2016-06-24" @default.
• W2046288766 creator A5005722949 @default.
• W2046288766 creator A5045216846 @default.
• W2046288766 creator A5072321996 @default.
• W2046288766 date "2004-06-01" @default.
• W2046288766 modified "2023-09-27" @default.
• W2046288766 title "Heavy ion elastic recoil detection analysis of silicon-rich silica films" @default.
• W2046288766 cites W1618702369 @default.
• W2046288766 cites W1976649338 @default.
• W2046288766 cites W1985771037 @default.
• W2046288766 cites W2001904971 @default.
• W2046288766 cites W2017419779 @default.
• W2046288766 cites W2048718596 @default.
• W2046288766 cites W2058808521 @default.
• W2046288766 cites W2074672959 @default.
• W2046288766 cites W2076683840 @default.
• W2046288766 cites W2113420097 @default.
• W2046288766 cites W2141206675 @default.
• W2046288766 doi "https://doi.org/10.1016/j.nimb.2004.01.142" @default.
• W2046288766 hasPublicationYear "2004" @default.
• W2046288766 type Work @default.
• W2046288766 sameAs 2046288766 @default.
• W2046288766 citedByCount "4" @default.
• W2046288766 countsByYear W20462887662015 @default.
• W2046288766 crossrefType "journal-article" @default.
• W2046288766 hasAuthorship W2046288766A5005722949 @default.
• W2046288766 hasAuthorship W2046288766A5045216846 @default.
• W2046288766 hasAuthorship W2046288766A5072321996 @default.
• W2046288766 hasConcept C107872376 @default.
• W2046288766 hasConcept C113196181 @default.
• W2046288766 hasConcept C121332964 @default.
• W2046288766 hasConcept C127413603 @default.
• W2046288766 hasConcept C136525101 @default.
• W2046288766 hasConcept C142724271 @default.
• W2046288766 hasConcept C145148216 @default.
• W2046288766 hasConcept C151730666 @default.
• W2046288766 hasConcept C159985019 @default.
• W2046288766 hasConcept C171250308 @default.
• W2046288766 hasConcept C175854130 @default.
• W2046288766 hasConcept C178790620 @default.
• W2046288766 hasConcept C184779094 @default.
• W2046288766 hasConcept C185592680 @default.
• W2046288766 hasConcept C19067145 @default.
• W2046288766 hasConcept C192562407 @default.
• W2046288766 hasConcept C204787440 @default.
• W2046288766 hasConcept C2776523803 @default.
• W2046288766 hasConcept C2776668124 @default.
• W2046288766 hasConcept C2777855556 @default.
• W2046288766 hasConcept C2816523 @default.
• W2046288766 hasConcept C38347018 @default.
• W2046288766 hasConcept C42360764 @default.
• W2046288766 hasConcept C49040817 @default.
• W2046288766 hasConcept C544956773 @default.
• W2046288766 hasConcept C57410435 @default.
• W2046288766 hasConcept C64297162 @default.
• W2046288766 hasConcept C71924100 @default.
• W2046288766 hasConcept C86803240 @default.
• W2046288766 hasConceptScore W2046288766C107872376 @default.
• W2046288766 hasConceptScore W2046288766C113196181 @default.
• W2046288766 hasConceptScore W2046288766C121332964 @default.
• W2046288766 hasConceptScore W2046288766C127413603 @default.
• W2046288766 hasConceptScore W2046288766C136525101 @default.
• W2046288766 hasConceptScore W2046288766C142724271 @default.
• W2046288766 hasConceptScore W2046288766C145148216 @default.
• W2046288766 hasConceptScore W2046288766C151730666 @default.
• W2046288766 hasConceptScore W2046288766C159985019 @default.
• W2046288766 hasConceptScore W2046288766C171250308 @default.
• W2046288766 hasConceptScore W2046288766C175854130 @default.
• W2046288766 hasConceptScore W2046288766C178790620 @default.
• W2046288766 hasConceptScore W2046288766C184779094 @default.
• W2046288766 hasConceptScore W2046288766C185592680 @default.
• W2046288766 hasConceptScore W2046288766C19067145 @default.
• W2046288766 hasConceptScore W2046288766C192562407 @default.
• W2046288766 hasConceptScore W2046288766C204787440 @default.
• W2046288766 hasConceptScore W2046288766C2776523803 @default.
• W2046288766 hasConceptScore W2046288766C2776668124 @default.
• W2046288766 hasConceptScore W2046288766C2777855556 @default.
• W2046288766 hasConceptScore W2046288766C2816523 @default.
• W2046288766 hasConceptScore W2046288766C38347018 @default.
• W2046288766 hasConceptScore W2046288766C42360764 @default.
• W2046288766 hasConceptScore W2046288766C49040817 @default.
• W2046288766 hasConceptScore W2046288766C544956773 @default.
• W2046288766 hasConceptScore W2046288766C57410435 @default.
• W2046288766 hasConceptScore W2046288766C64297162 @default.
• W2046288766 hasConceptScore W2046288766C71924100 @default.
• W2046288766 hasConceptScore W2046288766C86803240 @default.
• W2046288766 hasLocation W20462887661 @default.
• W2046288766 hasOpenAccess W2046288766 @default.
• W2046288766 hasPrimaryLocation W20462887661 @default.
• W2046288766 hasRelatedWork W1976794902 @default.
• W2046288766 hasRelatedWork W1982778133 @default.
• W2046288766 hasRelatedWork W2003971460 @default.
• W2046288766 hasRelatedWork W2037003285 @default.
• W2046288766 hasRelatedWork W2037252009 @default.
• W2046288766 hasRelatedWork W2066288074 @default.
• W2046288766 hasRelatedWork W2092149643 @default.
• W2046288766 hasRelatedWork W2978305163 @default.

• next