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- W2046294711 abstract "A new-type microwave plasma source has been developed for materials processing. The plasma reactor employed a launcher of azimuthally symmetric surface waves at a frequency of 2.45 GHz and also magnetic multicusp fields around the reactor chamber walls. This configuration yielded high-density (Ne≳1011 cm−3) plasmas sustained by surface waves even at low gas pressures below 10 mTorr, following easy plasma ignition by electron cyclotron resonance (ECR) discharges. Electrical and optical diagnostics were made to obtain the plasma properties in Ar. It was shown that a transition occurs from ECR exited to surface-wave excited plasmas under conditions where the plasma electron density exceeds a critical value of Ne∼1×1011 cm−3." @default.
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- W2046294711 date "1998-09-01" @default.
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- W2046294711 title "New-type microwave plasma source excited by azimuthally symmetric surface waves with magnetic multicusp fields" @default.
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