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- W2046332289 abstract "In this paper, microgyroscopes using fully decoupled structure (FDS) and partially decoupled structure (PDS) were designed. They both consist of dual proof mass, sense frame and drive frame structure. Sense frame is directly anchored on the substrate in FDS. The cross talk between drive mode and sense mode was investigated. The ANSYS software has been used to simulate two types of decoupled Z-axis microgyroscopes for performance comparison. The cross-talk displacement ratio η <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Dts</sub> in FDS is 0.19% at the frequency of 6650 Hz and η <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Dts</sub> in PDS is 0.24% at the frequency of 5776 Hz. The results show that the FDS microgyroscopes have lower quadrature-error effect than PDS. The noise level of both FDS and PDS microgyroscopes are 0.362 deg/hr/√Hz and 0.44 deg/hr/√Hz, respectively." @default.
- W2046332289 created "2016-06-24" @default.
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- W2046332289 date "2010-01-01" @default.
- W2046332289 modified "2023-09-27" @default.
- W2046332289 title "Design and simulation of two Z-axis microgyroscopes with different types of decoupled structures" @default.
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- W2046332289 doi "https://doi.org/10.1109/nems.2010.5592144" @default.
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