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- W2046408251 abstract "The effect of plasma posttreatment on the resistivity and stability of tetrakis-dimethylamido-titanium (TDMAT)-based atomic layer deposition TiN films was investigated. Posttreatment with hydrogen plasma was effective for lowering the resistivity of the TiN films and also for improving their stability in air. Longer plasma pulse times with high power yielded films of lower resistivity aand increased stability in air. However, there was no noticeable improvement of the film's stability with nitrogen plasma gas." @default.
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- W2046408251 date "2004-01-13" @default.
- W2046408251 modified "2023-09-28" @default.
- W2046408251 title "Stability of Plasma Posttreated TiN Films Prepared by Alternating Cyclic Pulses of Tetrakis-Dimethylamido-Titanium and Ammonia" @default.
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- W2046408251 doi "https://doi.org/10.1143/jjap.43.303" @default.
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