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- W2046473063 abstract "Sub-wavelength multiphoton nanoprocessing of silicon wafers, direct nanowriting of metals, boro- silicate glass or polymers, laser processing for nanofluidics applications as well as 3D maskless li- thography by two-photon polymerization have been performed using several compact near infrared MHz femtosecond lasers as tuneable turn-key, one-box Chameleon (coherent) and Mai-Tai (spectra physics) oscillators as well as a special femtoTrain system (High Q laser production GmbH). The lasers were coupled with the scanning microscopes FemtOcut (JenLab GmbH) and a modified ZEISS LSM510-NLO system. MHz femtosecond laser pulses with nanojoule photon energies can be considered as novel tools for nanoprocessing in material science, nanobiotechnology and nanomedicine." @default.
- W2046473063 created "2016-06-24" @default.
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- W2046473063 date "2008-04-01" @default.
- W2046473063 modified "2023-09-24" @default.
- W2046473063 title "Nanostructuring with Nanojoule Femtosecond Laser Pulses" @default.
- W2046473063 doi "https://doi.org/10.2961/jlmn.2008.02.0009" @default.
- W2046473063 hasPublicationYear "2008" @default.
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