Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046512009> ?p ?o ?g. }
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- W2046512009 endingPage "218" @default.
- W2046512009 startingPage "214" @default.
- W2046512009 abstract "The use of TiSi2 layers as ohmic contacts in complementary MOS (CMOS) devices is expected to introduce large distortions in the underlying silicon which may degrade the device performances. In this work, the TEM technique known as convergent beam electron diffraction (CBED) has been employed to map the strain distributions across 〈1 1 0〉 cross-sectional specimens of sub-quarter-micron CMOS structures. Different experimental set-ups in terms of energy filtering, liquid nitrogen cooling and zone axis have been explored and compared to each other by using three differently equipped microscopes. The strain induced on silicon by TiSi2 layers has then been investigated, quantified and compared with that due to the presence of an oxide isolation trench. Also, the effects of depositing a TiN capping layer on TiSi2 have been analysed. Our results show that its presence results in a more tensile strain without altering the strain distribution trend." @default.
- W2046512009 created "2016-06-24" @default.
- W2046512009 creator A5006392165 @default.
- W2046512009 creator A5016943647 @default.
- W2046512009 creator A5045287923 @default.
- W2046512009 creator A5050482761 @default.
- W2046512009 creator A5070675087 @default.
- W2046512009 creator A5072312497 @default.
- W2046512009 creator A5073104666 @default.
- W2046512009 date "2002-03-01" @default.
- W2046512009 modified "2023-09-26" @default.
- W2046512009 title "Strain induced by Ti salicidation in sub-quarter-micron CMOS devices, as measured by TEM/CBED" @default.
- W2046512009 cites W1973404447 @default.
- W2046512009 cites W2061278135 @default.
- W2046512009 cites W2074560513 @default.
- W2046512009 cites W2081212153 @default.
- W2046512009 cites W2313866418 @default.
- W2046512009 doi "https://doi.org/10.1016/s0169-4332(01)00750-4" @default.
- W2046512009 hasPublicationYear "2002" @default.
- W2046512009 type Work @default.
- W2046512009 sameAs 2046512009 @default.
- W2046512009 citedByCount "8" @default.
- W2046512009 crossrefType "journal-article" @default.
- W2046512009 hasAuthorship W2046512009A5006392165 @default.
- W2046512009 hasAuthorship W2046512009A5016943647 @default.
- W2046512009 hasAuthorship W2046512009A5045287923 @default.
- W2046512009 hasAuthorship W2046512009A5050482761 @default.
- W2046512009 hasAuthorship W2046512009A5070675087 @default.
- W2046512009 hasAuthorship W2046512009A5072312497 @default.
- W2046512009 hasAuthorship W2046512009A5073104666 @default.
- W2046512009 hasConcept C105066941 @default.
- W2046512009 hasConcept C120665830 @default.
- W2046512009 hasConcept C121332964 @default.
- W2046512009 hasConcept C126322002 @default.
- W2046512009 hasConcept C138230450 @default.
- W2046512009 hasConcept C155310634 @default.
- W2046512009 hasConcept C159985019 @default.
- W2046512009 hasConcept C191897082 @default.
- W2046512009 hasConcept C192562407 @default.
- W2046512009 hasConcept C207114421 @default.
- W2046512009 hasConcept C2778022156 @default.
- W2046512009 hasConcept C2779227376 @default.
- W2046512009 hasConcept C2779292183 @default.
- W2046512009 hasConcept C46362747 @default.
- W2046512009 hasConcept C49040817 @default.
- W2046512009 hasConcept C525849907 @default.
- W2046512009 hasConcept C544956773 @default.
- W2046512009 hasConcept C71924100 @default.
- W2046512009 hasConcept C77557913 @default.
- W2046512009 hasConceptScore W2046512009C105066941 @default.
- W2046512009 hasConceptScore W2046512009C120665830 @default.
- W2046512009 hasConceptScore W2046512009C121332964 @default.
- W2046512009 hasConceptScore W2046512009C126322002 @default.
- W2046512009 hasConceptScore W2046512009C138230450 @default.
- W2046512009 hasConceptScore W2046512009C155310634 @default.
- W2046512009 hasConceptScore W2046512009C159985019 @default.
- W2046512009 hasConceptScore W2046512009C191897082 @default.
- W2046512009 hasConceptScore W2046512009C192562407 @default.
- W2046512009 hasConceptScore W2046512009C207114421 @default.
- W2046512009 hasConceptScore W2046512009C2778022156 @default.
- W2046512009 hasConceptScore W2046512009C2779227376 @default.
- W2046512009 hasConceptScore W2046512009C2779292183 @default.
- W2046512009 hasConceptScore W2046512009C46362747 @default.
- W2046512009 hasConceptScore W2046512009C49040817 @default.
- W2046512009 hasConceptScore W2046512009C525849907 @default.
- W2046512009 hasConceptScore W2046512009C544956773 @default.
- W2046512009 hasConceptScore W2046512009C71924100 @default.
- W2046512009 hasConceptScore W2046512009C77557913 @default.
- W2046512009 hasIssue "1-2" @default.
- W2046512009 hasLocation W20465120091 @default.
- W2046512009 hasOpenAccess W2046512009 @default.
- W2046512009 hasPrimaryLocation W20465120091 @default.
- W2046512009 hasRelatedWork W1854109909 @default.
- W2046512009 hasRelatedWork W2017147916 @default.
- W2046512009 hasRelatedWork W2093257781 @default.
- W2046512009 hasRelatedWork W2096400503 @default.
- W2046512009 hasRelatedWork W2114804203 @default.
- W2046512009 hasRelatedWork W2157080198 @default.
- W2046512009 hasRelatedWork W2162701336 @default.
- W2046512009 hasRelatedWork W2532938228 @default.
- W2046512009 hasRelatedWork W3147404260 @default.
- W2046512009 hasRelatedWork W2096691586 @default.
- W2046512009 hasVolume "188" @default.
- W2046512009 isParatext "false" @default.
- W2046512009 isRetracted "false" @default.
- W2046512009 magId "2046512009" @default.
- W2046512009 workType "article" @default.