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• W2046525788 abstract "This paper serves as a review of current solutions for MEMS metrology. This survey provides an extensive and in-depth review of the current tools and their fundamental limitations. Techniques that are reviewed include tools that are extensions of semiconductor tools, scaled down versions of conventional metrology tools and entirely novel methods for MEMS inspection." @default.
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• W2046525788 date "2008-01-01" @default.
• W2046525788 modified "2023-09-28" @default.
• W2046525788 title "Review of MEMS metrology solutions" @default.
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• W2046525788 doi "https://doi.org/10.1504/ijmtm.2008.016781" @default.
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