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- W2046558766 abstract "Lattice strain distribution was measured in Si substrates near NiSi 2 islands. Using the convergent beam electron diffraction (CBED) technique, quantitative and highly spatially resolved evaluations were carried out. Variations in the CBED patterns were found to be due to a combination of stress components with different orientations and magnitude. As a result, it was revealed that, in addition to normal stress components, singular stress with characteristic orientation or extremely high strain concentration was observed, especially near the NiSi 2 island corner. This actual strain distribution was considered to be highly influenced by the shape, size and orientation of the NiSi 2 island on Si substrates." @default.
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- W2046558766 date "1997-08-01" @default.
- W2046558766 modified "2023-09-27" @default.
- W2046558766 title "Convergent Beam Electron Diffraction Measurement for Local Strain Distribution in Si around a NiSi<sub>2</sub> Island" @default.
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- W2046558766 doi "https://doi.org/10.1143/jjap.36.5072" @default.
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