Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046588716> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2046588716 endingPage "256" @default.
- W2046588716 startingPage "252" @default.
- W2046588716 abstract "Etching characteristics of Pb{(Mg1/3Nb2/3)0.9Ti0.1}O3 (PMN–PT) were studied by an inductively coupled plasma etcher using Ar, Cl2, and BCl3 gas combinations. Using Ar/BCl3 and Cl2/BCl3, PMN–PT etch rates higher than 2500 Å/min could be obtained with the etch selectivity over photoresist higher than 1.0. In general, the increase of BCl3 in Ar/BCl3 and Cl2/BCl3 increased etch selectivity without decreasing PMN–PT etch rates significantly. X-Ray photoelectron spectroscopic analysis revealed that, during the PMN–PT etching, Ar ion bombardment enhanced the etching of Pb and Ti components preferentially, BCl3 plasma enhanced the etching of O, Nb, and Mg components, and Cl2 plasma enhanced the etching of Pb component. The etched profile angle of PMN–PT increased with the increase of PR selectivity." @default.
- W2046588716 created "2016-06-24" @default.
- W2046588716 creator A5009324816 @default.
- W2046588716 creator A5040486860 @default.
- W2046588716 creator A5049292212 @default.
- W2046588716 creator A5067511036 @default.
- W2046588716 creator A5068292935 @default.
- W2046588716 date "2000-09-01" @default.
- W2046588716 modified "2023-09-27" @default.
- W2046588716 title "Etching characteristics of lead magnesium niobate–lead titanate (PMN–PT) relaxor ferroelectrics" @default.
- W2046588716 cites W1526420520 @default.
- W2046588716 cites W1638533794 @default.
- W2046588716 cites W1970277602 @default.
- W2046588716 cites W2005220545 @default.
- W2046588716 cites W2009533336 @default.
- W2046588716 cites W2011158969 @default.
- W2046588716 cites W2044865798 @default.
- W2046588716 cites W2268516566 @default.
- W2046588716 doi "https://doi.org/10.1016/s0257-8972(00)00789-1" @default.
- W2046588716 hasPublicationYear "2000" @default.
- W2046588716 type Work @default.
- W2046588716 sameAs 2046588716 @default.
- W2046588716 citedByCount "7" @default.
- W2046588716 countsByYear W20465887162013 @default.
- W2046588716 countsByYear W20465887162016 @default.
- W2046588716 countsByYear W20465887162017 @default.
- W2046588716 countsByYear W20465887162018 @default.
- W2046588716 crossrefType "journal-article" @default.
- W2046588716 hasAuthorship W2046588716A5009324816 @default.
- W2046588716 hasAuthorship W2046588716A5040486860 @default.
- W2046588716 hasAuthorship W2046588716A5049292212 @default.
- W2046588716 hasAuthorship W2046588716A5067511036 @default.
- W2046588716 hasAuthorship W2046588716A5068292935 @default.
- W2046588716 hasConcept C100460472 @default.
- W2046588716 hasConcept C107187091 @default.
- W2046588716 hasConcept C113196181 @default.
- W2046588716 hasConcept C118792377 @default.
- W2046588716 hasConcept C121332964 @default.
- W2046588716 hasConcept C127413603 @default.
- W2046588716 hasConcept C1291036 @default.
- W2046588716 hasConcept C130472188 @default.
- W2046588716 hasConcept C134406635 @default.
- W2046588716 hasConcept C161790260 @default.
- W2046588716 hasConcept C171250308 @default.
- W2046588716 hasConcept C175708663 @default.
- W2046588716 hasConcept C185592680 @default.
- W2046588716 hasConcept C192562407 @default.
- W2046588716 hasConcept C2779227376 @default.
- W2046588716 hasConcept C42360764 @default.
- W2046588716 hasConcept C43617362 @default.
- W2046588716 hasConcept C55493867 @default.
- W2046588716 hasConcept C62520636 @default.
- W2046588716 hasConcept C82706917 @default.
- W2046588716 hasConcept C95974651 @default.
- W2046588716 hasConceptScore W2046588716C100460472 @default.
- W2046588716 hasConceptScore W2046588716C107187091 @default.
- W2046588716 hasConceptScore W2046588716C113196181 @default.
- W2046588716 hasConceptScore W2046588716C118792377 @default.
- W2046588716 hasConceptScore W2046588716C121332964 @default.
- W2046588716 hasConceptScore W2046588716C127413603 @default.
- W2046588716 hasConceptScore W2046588716C1291036 @default.
- W2046588716 hasConceptScore W2046588716C130472188 @default.
- W2046588716 hasConceptScore W2046588716C134406635 @default.
- W2046588716 hasConceptScore W2046588716C161790260 @default.
- W2046588716 hasConceptScore W2046588716C171250308 @default.
- W2046588716 hasConceptScore W2046588716C175708663 @default.
- W2046588716 hasConceptScore W2046588716C185592680 @default.
- W2046588716 hasConceptScore W2046588716C192562407 @default.
- W2046588716 hasConceptScore W2046588716C2779227376 @default.
- W2046588716 hasConceptScore W2046588716C42360764 @default.
- W2046588716 hasConceptScore W2046588716C43617362 @default.
- W2046588716 hasConceptScore W2046588716C55493867 @default.
- W2046588716 hasConceptScore W2046588716C62520636 @default.
- W2046588716 hasConceptScore W2046588716C82706917 @default.
- W2046588716 hasConceptScore W2046588716C95974651 @default.
- W2046588716 hasIssue "1-3" @default.
- W2046588716 hasLocation W20465887161 @default.
- W2046588716 hasOpenAccess W2046588716 @default.
- W2046588716 hasPrimaryLocation W20465887161 @default.
- W2046588716 hasRelatedWork W1156097556 @default.
- W2046588716 hasRelatedWork W2008135258 @default.
- W2046588716 hasRelatedWork W2079137774 @default.
- W2046588716 hasRelatedWork W2084863661 @default.
- W2046588716 hasRelatedWork W2363418327 @default.
- W2046588716 hasRelatedWork W2371641751 @default.
- W2046588716 hasRelatedWork W2518980225 @default.
- W2046588716 hasRelatedWork W2910617922 @default.
- W2046588716 hasRelatedWork W3135103619 @default.
- W2046588716 hasRelatedWork W2464823099 @default.
- W2046588716 hasVolume "131" @default.
- W2046588716 isParatext "false" @default.
- W2046588716 isRetracted "false" @default.
- W2046588716 magId "2046588716" @default.
- W2046588716 workType "article" @default.