Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046621918> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2046621918 endingPage "6981" @default.
- W2046621918 startingPage "6981" @default.
- W2046621918 abstract "As the requirements of critical dimension (CD) uniformity on photomasks continue to tighten with advanced logic and memory devices, the dry etching process should be adopted to meet the needs of the optical proximity effect correction (OPC) and reduced bias process [W. T. Chen and M. Kamma: Proc. SPIE 3412 (1998) 149.]. There are severe CD variations in the dry etching process due to chrome (Cr) pattern density with various clear and dark fields. Through experiments, on the CD variation was investigated in the wet etching process, as well as in the dry etching process. This work focused on the tracing-determining the actual cause of the loading effect. It was revealed that what accounts for a major portion of the loading effect is not the Cr dry etching process, but the rescattering of electrons of the electron-beam exposure system. Rescattered electrons in this article refers to electrons that are reflected between the specimen and the lower parts of the electron-beam column and expose the unexposed area. In this paper, the existence of rescattered electrons was experimentally confirmed with a 10 kV acceleration-voltage system and the CD variation by reflected electrons was also investigated." @default.
- W2046621918 created "2016-06-24" @default.
- W2046621918 creator A5005671801 @default.
- W2046621918 creator A5021509376 @default.
- W2046621918 creator A5032833026 @default.
- W2046621918 creator A5053863446 @default.
- W2046621918 creator A5089073799 @default.
- W2046621918 creator A5089797962 @default.
- W2046621918 date "1999-12-01" @default.
- W2046621918 modified "2023-09-26" @default.
- W2046621918 title "A Study of Loading Effect during Electron-Beam Exposure and Etching Process in Photomask Fabrication" @default.
- W2046621918 cites W2066860005 @default.
- W2046621918 cites W2127423978 @default.
- W2046621918 cites W2171207633 @default.
- W2046621918 cites W2056445372 @default.
- W2046621918 doi "https://doi.org/10.1143/jjap.38.6981" @default.
- W2046621918 hasPublicationYear "1999" @default.
- W2046621918 type Work @default.
- W2046621918 sameAs 2046621918 @default.
- W2046621918 citedByCount "0" @default.
- W2046621918 crossrefType "journal-article" @default.
- W2046621918 hasAuthorship W2046621918A5005671801 @default.
- W2046621918 hasAuthorship W2046621918A5021509376 @default.
- W2046621918 hasAuthorship W2046621918A5032833026 @default.
- W2046621918 hasAuthorship W2046621918A5053863446 @default.
- W2046621918 hasAuthorship W2046621918A5089073799 @default.
- W2046621918 hasAuthorship W2046621918A5089797962 @default.
- W2046621918 hasConcept C100460472 @default.
- W2046621918 hasConcept C120665830 @default.
- W2046621918 hasConcept C121332964 @default.
- W2046621918 hasConcept C122802935 @default.
- W2046621918 hasConcept C1291036 @default.
- W2046621918 hasConcept C136525101 @default.
- W2046621918 hasConcept C142724271 @default.
- W2046621918 hasConcept C147120987 @default.
- W2046621918 hasConcept C14737013 @default.
- W2046621918 hasConcept C171250308 @default.
- W2046621918 hasConcept C185544564 @default.
- W2046621918 hasConcept C192562407 @default.
- W2046621918 hasConcept C200274948 @default.
- W2046621918 hasConcept C204223013 @default.
- W2046621918 hasConcept C204787440 @default.
- W2046621918 hasConcept C207789793 @default.
- W2046621918 hasConcept C2777441419 @default.
- W2046621918 hasConcept C2779227376 @default.
- W2046621918 hasConcept C33220542 @default.
- W2046621918 hasConcept C49040817 @default.
- W2046621918 hasConcept C53524968 @default.
- W2046621918 hasConcept C71924100 @default.
- W2046621918 hasConcept C95312477 @default.
- W2046621918 hasConceptScore W2046621918C100460472 @default.
- W2046621918 hasConceptScore W2046621918C120665830 @default.
- W2046621918 hasConceptScore W2046621918C121332964 @default.
- W2046621918 hasConceptScore W2046621918C122802935 @default.
- W2046621918 hasConceptScore W2046621918C1291036 @default.
- W2046621918 hasConceptScore W2046621918C136525101 @default.
- W2046621918 hasConceptScore W2046621918C142724271 @default.
- W2046621918 hasConceptScore W2046621918C147120987 @default.
- W2046621918 hasConceptScore W2046621918C14737013 @default.
- W2046621918 hasConceptScore W2046621918C171250308 @default.
- W2046621918 hasConceptScore W2046621918C185544564 @default.
- W2046621918 hasConceptScore W2046621918C192562407 @default.
- W2046621918 hasConceptScore W2046621918C200274948 @default.
- W2046621918 hasConceptScore W2046621918C204223013 @default.
- W2046621918 hasConceptScore W2046621918C204787440 @default.
- W2046621918 hasConceptScore W2046621918C207789793 @default.
- W2046621918 hasConceptScore W2046621918C2777441419 @default.
- W2046621918 hasConceptScore W2046621918C2779227376 @default.
- W2046621918 hasConceptScore W2046621918C33220542 @default.
- W2046621918 hasConceptScore W2046621918C49040817 @default.
- W2046621918 hasConceptScore W2046621918C53524968 @default.
- W2046621918 hasConceptScore W2046621918C71924100 @default.
- W2046621918 hasConceptScore W2046621918C95312477 @default.
- W2046621918 hasIssue "12S" @default.
- W2046621918 hasLocation W20466219181 @default.
- W2046621918 hasOpenAccess W2046621918 @default.
- W2046621918 hasPrimaryLocation W20466219181 @default.
- W2046621918 hasRelatedWork W1964135325 @default.
- W2046621918 hasRelatedWork W2011228020 @default.
- W2046621918 hasRelatedWork W2031175500 @default.
- W2046621918 hasRelatedWork W2046621918 @default.
- W2046621918 hasRelatedWork W2063857210 @default.
- W2046621918 hasRelatedWork W2069196165 @default.
- W2046621918 hasRelatedWork W2132357034 @default.
- W2046621918 hasRelatedWork W2146922750 @default.
- W2046621918 hasRelatedWork W2324609337 @default.
- W2046621918 hasRelatedWork W2463337637 @default.
- W2046621918 hasVolume "38" @default.
- W2046621918 isParatext "false" @default.
- W2046621918 isRetracted "false" @default.
- W2046621918 magId "2046621918" @default.
- W2046621918 workType "article" @default.