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- W2046680650 endingPage "085004" @default.
- W2046680650 startingPage "085004" @default.
- W2046680650 abstract "This paper describes the development, fabrication and examination of an atom chip through silicon vias (TSV), which is anodically bonded with a Pyrex glass cell to form an ultra-high-vacuum system for the application of Bose–Einstein condensation (BEC) experiments. The silicon via is etched by the inductively coupled plasma reactive ion etch and filled by copper plating technology. The metal wires on both sides of the atom chips are patterned by the lithography process. Three different sizes of TSV are made and tested by continuously applying a maximum current of 17 A under the vacuum (70 Torr) and in air. In addition, after the thermal cycling of an anodic bonding process (requested at 350 °C) and a high electric field of 1000 V m−1, the TSV on atom chips can still hold the ultra-high vacuum (UHV). The conductive and vacuum yields of the TSV improved from 50% to 100% and from 75% to 81.25%, respectively after the modification of the fabrication process. Finally, the UHV test of TSV on atom chips at room temperature can be reached at 8 × 10−10 Torr, thus satisfying the requirements of atomic physics experiments under the UHV environment." @default.
- W2046680650 created "2016-06-24" @default.
- W2046680650 creator A5033157163 @default.
- W2046680650 creator A5041519726 @default.
- W2046680650 creator A5054091190 @default.
- W2046680650 creator A5070216025 @default.
- W2046680650 creator A5091031468 @default.
- W2046680650 date "2013-06-21" @default.
- W2046680650 modified "2023-10-16" @default.
- W2046680650 title "The development of an atom chip with through silicon vias for an ultra-high-vacuum cell" @default.
- W2046680650 cites W1966268258 @default.
- W2046680650 cites W1980261607 @default.
- W2046680650 cites W1991602497 @default.
- W2046680650 cites W2013152750 @default.
- W2046680650 cites W2017728171 @default.
- W2046680650 cites W2026808990 @default.
- W2046680650 cites W2038704816 @default.
- W2046680650 cites W2046520155 @default.
- W2046680650 cites W2058910397 @default.
- W2046680650 cites W2079076205 @default.
- W2046680650 cites W2159190658 @default.
- W2046680650 cites W2061726490 @default.
- W2046680650 doi "https://doi.org/10.1088/0960-1317/23/8/085004" @default.
- W2046680650 hasPublicationYear "2013" @default.
- W2046680650 type Work @default.
- W2046680650 sameAs 2046680650 @default.
- W2046680650 citedByCount "10" @default.
- W2046680650 countsByYear W20466806502014 @default.
- W2046680650 countsByYear W20466806502015 @default.
- W2046680650 countsByYear W20466806502016 @default.
- W2046680650 countsByYear W20466806502018 @default.
- W2046680650 countsByYear W20466806502023 @default.
- W2046680650 crossrefType "journal-article" @default.
- W2046680650 hasAuthorship W2046680650A5033157163 @default.
- W2046680650 hasAuthorship W2046680650A5041519726 @default.
- W2046680650 hasAuthorship W2046680650A5054091190 @default.
- W2046680650 hasAuthorship W2046680650A5070216025 @default.
- W2046680650 hasAuthorship W2046680650A5091031468 @default.
- W2046680650 hasConcept C119599485 @default.
- W2046680650 hasConcept C127413603 @default.
- W2046680650 hasConcept C149635348 @default.
- W2046680650 hasConcept C165005293 @default.
- W2046680650 hasConcept C171250308 @default.
- W2046680650 hasConcept C192562407 @default.
- W2046680650 hasConcept C2983805867 @default.
- W2046680650 hasConcept C49040817 @default.
- W2046680650 hasConcept C544956773 @default.
- W2046680650 hasConcept C58312451 @default.
- W2046680650 hasConcept C61696701 @default.
- W2046680650 hasConceptScore W2046680650C119599485 @default.
- W2046680650 hasConceptScore W2046680650C127413603 @default.
- W2046680650 hasConceptScore W2046680650C149635348 @default.
- W2046680650 hasConceptScore W2046680650C165005293 @default.
- W2046680650 hasConceptScore W2046680650C171250308 @default.
- W2046680650 hasConceptScore W2046680650C192562407 @default.
- W2046680650 hasConceptScore W2046680650C2983805867 @default.
- W2046680650 hasConceptScore W2046680650C49040817 @default.
- W2046680650 hasConceptScore W2046680650C544956773 @default.
- W2046680650 hasConceptScore W2046680650C58312451 @default.
- W2046680650 hasConceptScore W2046680650C61696701 @default.
- W2046680650 hasIssue "8" @default.
- W2046680650 hasLocation W20466806501 @default.
- W2046680650 hasOpenAccess W2046680650 @default.
- W2046680650 hasPrimaryLocation W20466806501 @default.
- W2046680650 hasRelatedWork W2001723566 @default.
- W2046680650 hasRelatedWork W2064557019 @default.
- W2046680650 hasRelatedWork W2081381392 @default.
- W2046680650 hasRelatedWork W2083161047 @default.
- W2046680650 hasRelatedWork W2109083177 @default.
- W2046680650 hasRelatedWork W2141870625 @default.
- W2046680650 hasRelatedWork W2312552982 @default.
- W2046680650 hasRelatedWork W2367444237 @default.
- W2046680650 hasRelatedWork W2899084033 @default.
- W2046680650 hasRelatedWork W3147826182 @default.
- W2046680650 hasVolume "23" @default.
- W2046680650 isParatext "false" @default.
- W2046680650 isRetracted "false" @default.
- W2046680650 magId "2046680650" @default.
- W2046680650 workType "article" @default.