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• W2046704615 abstract "We have investigated the photolithography on the superconducting YBCO thin films with chemical etching. It was found that the films can be etched by HCl—H3PO4 mixing acid and the side-etching can be suppressed down to one micrometer. The influence on the critical temperature can be minimized to two degrees under well-controlled conditions." @default.
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• W2046704615 date "1988-01-01" @default.
• W2046704615 modified "2023-09-27" @default.
• W2046704615 title "INVESTIGATION OF PHOTOLITHOGRAPHY FOR FABRICATING OF YBCO SUPERCONDUCTING THIN FILMS DEVICES WITH CHEMICAL ETCHING" @default.
• W2046704615 doi "https://doi.org/10.1142/s0217984988001429" @default.
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