Matches in SemOpenAlex for { <https://semopenalex.org/work/W2046752468> ?p ?o ?g. }
- W2046752468 endingPage "6091" @default.
- W2046752468 startingPage "6085" @default.
- W2046752468 abstract "Hafnia films prepared onto silicon wafers at three substrate temperatures of 40, 160 and 280 °C are optically characterized utilizing the multi-sample method. The characterization uses the combination of variable angle spectroscopic ellipsometry and spectroscopic reflectometry within the spectral region 1.24–6.5 eV (190–1000 nm). The structural model of the HfO2 films includes boundary nanometric roughness, thickness non-uniformity and refractive index profile. Spectral dependences of the film optical constants are expressed using a recently developed parametrized joint density of states model describing the dielectric response of both interband transitions and excitations of localized states below the band gap. It is shown that the observed weak absorption below the band gap does not correspond to the Urbach tail." @default.
- W2046752468 created "2016-06-24" @default.
- W2046752468 creator A5005868834 @default.
- W2046752468 creator A5016431587 @default.
- W2046752468 creator A5027901451 @default.
- W2046752468 creator A5028778678 @default.
- W2046752468 creator A5042489933 @default.
- W2046752468 creator A5043526951 @default.
- W2046752468 creator A5049695011 @default.
- W2046752468 date "2011-07-01" @default.
- W2046752468 modified "2023-09-29" @default.
- W2046752468 title "Optical characterization of HfO2 thin films" @default.
- W2046752468 cites W1496024054 @default.
- W2046752468 cites W1604821991 @default.
- W2046752468 cites W1968355932 @default.
- W2046752468 cites W1973254579 @default.
- W2046752468 cites W1975772001 @default.
- W2046752468 cites W1977183327 @default.
- W2046752468 cites W1980117115 @default.
- W2046752468 cites W1980645539 @default.
- W2046752468 cites W1985605322 @default.
- W2046752468 cites W1987380794 @default.
- W2046752468 cites W1991444350 @default.
- W2046752468 cites W1997276028 @default.
- W2046752468 cites W1998949497 @default.
- W2046752468 cites W2003645630 @default.
- W2046752468 cites W2010841592 @default.
- W2046752468 cites W2014359078 @default.
- W2046752468 cites W2015885127 @default.
- W2046752468 cites W2018352885 @default.
- W2046752468 cites W2025204186 @default.
- W2046752468 cites W2028567293 @default.
- W2046752468 cites W2034000947 @default.
- W2046752468 cites W2035054201 @default.
- W2046752468 cites W2040559543 @default.
- W2046752468 cites W2054468169 @default.
- W2046752468 cites W2054565622 @default.
- W2046752468 cites W2055476823 @default.
- W2046752468 cites W2058833045 @default.
- W2046752468 cites W2073167526 @default.
- W2046752468 cites W2076666978 @default.
- W2046752468 cites W2078194256 @default.
- W2046752468 cites W2092145984 @default.
- W2046752468 cites W2098963368 @default.
- W2046752468 cites W2126039362 @default.
- W2046752468 cites W2126358608 @default.
- W2046752468 cites W2139212691 @default.
- W2046752468 cites W2259854149 @default.
- W2046752468 doi "https://doi.org/10.1016/j.tsf.2011.03.128" @default.
- W2046752468 hasPublicationYear "2011" @default.
- W2046752468 type Work @default.
- W2046752468 sameAs 2046752468 @default.
- W2046752468 citedByCount "30" @default.
- W2046752468 countsByYear W20467524682013 @default.
- W2046752468 countsByYear W20467524682014 @default.
- W2046752468 countsByYear W20467524682015 @default.
- W2046752468 countsByYear W20467524682016 @default.
- W2046752468 countsByYear W20467524682017 @default.
- W2046752468 countsByYear W20467524682018 @default.
- W2046752468 countsByYear W20467524682019 @default.
- W2046752468 countsByYear W20467524682020 @default.
- W2046752468 countsByYear W20467524682021 @default.
- W2046752468 countsByYear W20467524682022 @default.
- W2046752468 countsByYear W20467524682023 @default.
- W2046752468 crossrefType "journal-article" @default.
- W2046752468 hasAuthorship W2046752468A5005868834 @default.
- W2046752468 hasAuthorship W2046752468A5016431587 @default.
- W2046752468 hasAuthorship W2046752468A5027901451 @default.
- W2046752468 hasAuthorship W2046752468A5028778678 @default.
- W2046752468 hasAuthorship W2046752468A5042489933 @default.
- W2046752468 hasAuthorship W2046752468A5043526951 @default.
- W2046752468 hasAuthorship W2046752468A5049695011 @default.
- W2046752468 hasConcept C103824480 @default.
- W2046752468 hasConcept C111368507 @default.
- W2046752468 hasConcept C113196181 @default.
- W2046752468 hasConcept C120665830 @default.
- W2046752468 hasConcept C121332964 @default.
- W2046752468 hasConcept C123609680 @default.
- W2046752468 hasConcept C125287762 @default.
- W2046752468 hasConcept C127313418 @default.
- W2046752468 hasConcept C133386390 @default.
- W2046752468 hasConcept C134132462 @default.
- W2046752468 hasConcept C159985019 @default.
- W2046752468 hasConcept C160671074 @default.
- W2046752468 hasConcept C171250308 @default.
- W2046752468 hasConcept C181966813 @default.
- W2046752468 hasConcept C18293161 @default.
- W2046752468 hasConcept C185592680 @default.
- W2046752468 hasConcept C19067145 @default.
- W2046752468 hasConcept C192562407 @default.
- W2046752468 hasConcept C2776778127 @default.
- W2046752468 hasConcept C2777289219 @default.
- W2046752468 hasConcept C2778925768 @default.
- W2046752468 hasConcept C2780841128 @default.
- W2046752468 hasConcept C31972630 @default.
- W2046752468 hasConcept C41008148 @default.
- W2046752468 hasConcept C41999313 @default.
- W2046752468 hasConcept C42067758 @default.