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- W2046754806 abstract "An array of VLS silicon whiskers, over 500 μm in length, under 20 μm diameter and 60 μm in pitch, has been grown on the silicon pattern of a SOI wafer. The “mesa method”, in which VLS whiskers were grown on silicon mesas topped with gold hats, was successfully applied to determine growth sites to micrometer accuracy. The whiskers and the pattern were further selectively plated with NiAu, and allowed electrical conduction that enables their application as electrical probe pins, during buckling deformation of the whiskers at the contacts." @default.
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- W2046754806 date "1996-07-01" @default.
- W2046754806 modified "2023-09-27" @default.
- W2046754806 title "VLS growth of silicon whiskers on a patterned silicon-on-insulator (SOI) wafer" @default.
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- W2046754806 doi "https://doi.org/10.1016/0022-0248(96)00158-3" @default.
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