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- W2046811215 abstract "A novel fabrication process produces high porosity polymer nanofilters with smooth, uniform, and straight pores with high aspect ratios. The process utilizes electron beam lithography and energetic neutral atom beam lithography and epitaxy techniques. The method has the potential to produce a new generation of high-precision, very-high-porosity, biocompatible filters with pore sizes down to 100nm." @default.
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- W2046811215 date "2009-11-01" @default.
- W2046811215 modified "2023-10-12" @default.
- W2046811215 title "Fabrication of high density, high-aspect-ratio polyimide nanofilters" @default.
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- W2046811215 doi "https://doi.org/10.1116/1.3242696" @default.
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