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- W2047029123 abstract "We present a description of a software tool and a methodology for easily creating photoresist development rate parameters in lithography simulation. The tool optimizes parameters using the Modified Simplex Method. The methodology uses the tool to provide insight into the effects of the development rate parameters and to find usable parameters quickly. The reasonings behind the methodology are discussed as well as advantages and disadvantages. Results from three different lithography simulators are shown to agree well with experimental cross-section SEM data." @default.
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- W2047029123 date "1996-06-07" @default.
- W2047029123 modified "2023-09-23" @default.
- W2047029123 title "<title>Method of easily extracting resist development parameters for lithography simulation</title>" @default.
- W2047029123 doi "https://doi.org/10.1117/12.240987" @default.
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