FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047111583> ?p ?o ?g. }

• W2047111583 endingPage "4503" @default.
• W2047111583 startingPage "4499" @default.
• W2047111583 abstract "Scaling analysis and finite element modeling of the governing transport equations are used to show that in the submicron features of damascene ultralarge scale integrated interconnect structures, diffusion of cupric ion and trace additives is the only transport process that affects plating uniformity. Potential variations in solution or in the metal film, while important on wafer (dm) length scales, are completely negligible on feature (μm) length scales. Convection is also unimportant in submicron features. As a result, changes in process parameters such as fluid flow rate, barrier film conductivity or thickness, or solution conductivity are unlikely to result in significant changes in plating uniformity or void formation inside trenches and vias. On the other hand, changes in plating current density, feature geometry, or additive concentration in the plating bath will have a large impact on filling profiles. The impact of diffusive limitations on feature filling is described by a dimensionless parameter . Low values of indicate that for typical damascene structures and plating conditions, cupric ion depletion is only on the order of a few percent, indicating that copper plating is essentially conformal. Only very deep or high‐aspect features will pinch off as a result of cupric ion depletion. For additives that are depleted at the metal surface, values of can be large, indicating the potential for substantial additive depletion inside trenches and vias. scales with . As a result, deeper features (larger L) plate less uniformly, as do more narrow features (smaller w). However, if aspect ratios (L/w) are held constant as critical dimensions decrease, beneficial effects of additive depletion will diminish in future device generations. © 1999 The Electrochemical Society. All rights reserved." @default.
• W2047111583 created "2016-06-24" @default.
• W2047111583 creator A5034521280 @default.
• W2047111583 creator A5065694744 @default.
• W2047111583 date "1999-12-01" @default.
• W2047111583 modified "2023-10-12" @default.
• W2047111583 title "Transport Phenomena That Control Electroplated Copper Filling of Submicron Vias and Trenches" @default.
• W2047111583 doi "https://doi.org/10.1149/1.1392664" @default.
• W2047111583 hasPublicationYear "1999" @default.
• W2047111583 type Work @default.
• W2047111583 sameAs 2047111583 @default.
• W2047111583 citedByCount "84" @default.
• W2047111583 countsByYear W20471115832012 @default.
• W2047111583 countsByYear W20471115832013 @default.
• W2047111583 countsByYear W20471115832014 @default.
• W2047111583 countsByYear W20471115832015 @default.
• W2047111583 countsByYear W20471115832016 @default.
• W2047111583 countsByYear W20471115832017 @default.
• W2047111583 countsByYear W20471115832018 @default.
• W2047111583 countsByYear W20471115832019 @default.
• W2047111583 countsByYear W20471115832020 @default.
• W2047111583 countsByYear W20471115832021 @default.
• W2047111583 crossrefType "journal-article" @default.
• W2047111583 hasAuthorship W2047111583A5034521280 @default.
• W2047111583 hasAuthorship W2047111583A5065694744 @default.
• W2047111583 hasConcept C116372231 @default.
• W2047111583 hasConcept C121332964 @default.
• W2047111583 hasConcept C127313418 @default.
• W2047111583 hasConcept C131540310 @default.
• W2047111583 hasConcept C138055206 @default.
• W2047111583 hasConcept C147789679 @default.
• W2047111583 hasConcept C155310634 @default.
• W2047111583 hasConcept C159985019 @default.
• W2047111583 hasConcept C160671074 @default.
• W2047111583 hasConcept C171250308 @default.
• W2047111583 hasConcept C185592680 @default.
• W2047111583 hasConcept C191897082 @default.
• W2047111583 hasConcept C192562407 @default.
• W2047111583 hasConcept C24872484 @default.
• W2047111583 hasConcept C2524010 @default.
• W2047111583 hasConcept C2776985018 @default.
• W2047111583 hasConcept C2779227376 @default.
• W2047111583 hasConcept C29216876 @default.
• W2047111583 hasConcept C33923547 @default.
• W2047111583 hasConcept C51807945 @default.
• W2047111583 hasConcept C544153396 @default.
• W2047111583 hasConcept C544778455 @default.
• W2047111583 hasConcept C57879066 @default.
• W2047111583 hasConcept C69357855 @default.
• W2047111583 hasConcept C8058405 @default.
• W2047111583 hasConcept C82558694 @default.
• W2047111583 hasConcept C97355855 @default.
• W2047111583 hasConcept C99844830 @default.
• W2047111583 hasConceptScore W2047111583C116372231 @default.
• W2047111583 hasConceptScore W2047111583C121332964 @default.
• W2047111583 hasConceptScore W2047111583C127313418 @default.
• W2047111583 hasConceptScore W2047111583C131540310 @default.
• W2047111583 hasConceptScore W2047111583C138055206 @default.
• W2047111583 hasConceptScore W2047111583C147789679 @default.
• W2047111583 hasConceptScore W2047111583C155310634 @default.
• W2047111583 hasConceptScore W2047111583C159985019 @default.
• W2047111583 hasConceptScore W2047111583C160671074 @default.
• W2047111583 hasConceptScore W2047111583C171250308 @default.
• W2047111583 hasConceptScore W2047111583C185592680 @default.
• W2047111583 hasConceptScore W2047111583C191897082 @default.
• W2047111583 hasConceptScore W2047111583C192562407 @default.
• W2047111583 hasConceptScore W2047111583C24872484 @default.
• W2047111583 hasConceptScore W2047111583C2524010 @default.
• W2047111583 hasConceptScore W2047111583C2776985018 @default.
• W2047111583 hasConceptScore W2047111583C2779227376 @default.
• W2047111583 hasConceptScore W2047111583C29216876 @default.
• W2047111583 hasConceptScore W2047111583C33923547 @default.
• W2047111583 hasConceptScore W2047111583C51807945 @default.
• W2047111583 hasConceptScore W2047111583C544153396 @default.
• W2047111583 hasConceptScore W2047111583C544778455 @default.
• W2047111583 hasConceptScore W2047111583C57879066 @default.
• W2047111583 hasConceptScore W2047111583C69357855 @default.
• W2047111583 hasConceptScore W2047111583C8058405 @default.
• W2047111583 hasConceptScore W2047111583C82558694 @default.
• W2047111583 hasConceptScore W2047111583C97355855 @default.
• W2047111583 hasConceptScore W2047111583C99844830 @default.
• W2047111583 hasIssue "12" @default.
• W2047111583 hasLocation W20471115831 @default.
• W2047111583 hasOpenAccess W2047111583 @default.
• W2047111583 hasPrimaryLocation W20471115831 @default.
• W2047111583 hasRelatedWork W1976947690 @default.
• W2047111583 hasRelatedWork W1982820757 @default.
• W2047111583 hasRelatedWork W2039036129 @default.
• W2047111583 hasRelatedWork W2075171636 @default.
• W2047111583 hasRelatedWork W2082831914 @default.
• W2047111583 hasRelatedWork W2106480950 @default.
• W2047111583 hasRelatedWork W2128384320 @default.
• W2047111583 hasRelatedWork W2154887827 @default.
• W2047111583 hasRelatedWork W2992689013 @default.
• W2047111583 hasRelatedWork W2477746199 @default.
• W2047111583 hasVolume "146" @default.
• W2047111583 isParatext "false" @default.
• W2047111583 isRetracted "false" @default.

• next