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- W2047131570 abstract "This paper presents the results of an investigation of optical power induced damage to surface-micromachined micromirrors. A mathematical model was developed and used to predict the minimum incident optical power that will permanently damage the reflective surface of a micromirror. The model is based on a heat flow analysis of a microelectromechanical systems (MEMS) device in thermal equilibrium under continuous direct illumination, and has been validated using a variety of micromirror designs with both thermal simulation and direct laser illumination." @default.
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- W2047131570 date "1998-10-01" @default.
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- W2047131570 title "Optical power induced damage to microelectromechanical mirrors" @default.
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- W2047131570 doi "https://doi.org/10.1016/s0924-4247(98)00106-x" @default.
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