Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047159369> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2047159369 abstract "Two families of polymers have been prepared and evaluated as silicon-containing bilayer resist candidates at both 193 nm and 13.4 nm (EUV). Both families of polymers are based on a tertiary ester protecting group in which the ester group contains a silicon cluster. The PRB family of polymers are random methacrylate copolymers and the PRC family are alternating maleic anhydride/norbornene polymers. The PRB family shows good resolution and sensitivity at both 193 nm and EUV, but suffers from adhesion failure between the imaging layer and the underlayer. The PRC polymers show good adhesion to underlayers and can print features at <EQ 0.12 micrometers at 193 nm and <EQ 0.10 micrometers at 13.4 nm." @default.
- W2047159369 created "2016-06-24" @default.
- W2047159369 creator A5016452503 @default.
- W2047159369 creator A5031901819 @default.
- W2047159369 creator A5040355360 @default.
- W2047159369 creator A5053439335 @default.
- W2047159369 creator A5087289516 @default.
- W2047159369 creator A5088914828 @default.
- W2047159369 creator A5089948718 @default.
- W2047159369 date "1999-06-11" @default.
- W2047159369 modified "2023-10-16" @default.
- W2047159369 title "Novel silicon-containing resists for EUV and 193-nm lithography" @default.
- W2047159369 doi "https://doi.org/10.1117/12.350204" @default.
- W2047159369 hasPublicationYear "1999" @default.
- W2047159369 type Work @default.
- W2047159369 sameAs 2047159369 @default.
- W2047159369 citedByCount "4" @default.
- W2047159369 crossrefType "proceedings-article" @default.
- W2047159369 hasAuthorship W2047159369A5016452503 @default.
- W2047159369 hasAuthorship W2047159369A5031901819 @default.
- W2047159369 hasAuthorship W2047159369A5040355360 @default.
- W2047159369 hasAuthorship W2047159369A5053439335 @default.
- W2047159369 hasAuthorship W2047159369A5087289516 @default.
- W2047159369 hasAuthorship W2047159369A5088914828 @default.
- W2047159369 hasAuthorship W2047159369A5089948718 @default.
- W2047159369 hasConcept C132050475 @default.
- W2047159369 hasConcept C15920480 @default.
- W2047159369 hasConcept C159985019 @default.
- W2047159369 hasConcept C162996421 @default.
- W2047159369 hasConcept C171250308 @default.
- W2047159369 hasConcept C185592680 @default.
- W2047159369 hasConcept C188027245 @default.
- W2047159369 hasConcept C192157962 @default.
- W2047159369 hasConcept C192562407 @default.
- W2047159369 hasConcept C204223013 @default.
- W2047159369 hasConcept C2777666793 @default.
- W2047159369 hasConcept C2779227376 @default.
- W2047159369 hasConcept C2780547246 @default.
- W2047159369 hasConcept C41625074 @default.
- W2047159369 hasConcept C49040817 @default.
- W2047159369 hasConcept C521977710 @default.
- W2047159369 hasConcept C53524968 @default.
- W2047159369 hasConcept C544956773 @default.
- W2047159369 hasConcept C55493867 @default.
- W2047159369 hasConceptScore W2047159369C132050475 @default.
- W2047159369 hasConceptScore W2047159369C15920480 @default.
- W2047159369 hasConceptScore W2047159369C159985019 @default.
- W2047159369 hasConceptScore W2047159369C162996421 @default.
- W2047159369 hasConceptScore W2047159369C171250308 @default.
- W2047159369 hasConceptScore W2047159369C185592680 @default.
- W2047159369 hasConceptScore W2047159369C188027245 @default.
- W2047159369 hasConceptScore W2047159369C192157962 @default.
- W2047159369 hasConceptScore W2047159369C192562407 @default.
- W2047159369 hasConceptScore W2047159369C204223013 @default.
- W2047159369 hasConceptScore W2047159369C2777666793 @default.
- W2047159369 hasConceptScore W2047159369C2779227376 @default.
- W2047159369 hasConceptScore W2047159369C2780547246 @default.
- W2047159369 hasConceptScore W2047159369C41625074 @default.
- W2047159369 hasConceptScore W2047159369C49040817 @default.
- W2047159369 hasConceptScore W2047159369C521977710 @default.
- W2047159369 hasConceptScore W2047159369C53524968 @default.
- W2047159369 hasConceptScore W2047159369C544956773 @default.
- W2047159369 hasConceptScore W2047159369C55493867 @default.
- W2047159369 hasLocation W20471593691 @default.
- W2047159369 hasOpenAccess W2047159369 @default.
- W2047159369 hasPrimaryLocation W20471593691 @default.
- W2047159369 hasRelatedWork W1551361487 @default.
- W2047159369 hasRelatedWork W1996211766 @default.
- W2047159369 hasRelatedWork W2028472360 @default.
- W2047159369 hasRelatedWork W2036988869 @default.
- W2047159369 hasRelatedWork W2052439749 @default.
- W2047159369 hasRelatedWork W2059805006 @default.
- W2047159369 hasRelatedWork W2328303694 @default.
- W2047159369 hasRelatedWork W2360345270 @default.
- W2047159369 hasRelatedWork W2468920380 @default.
- W2047159369 hasRelatedWork W2013519709 @default.
- W2047159369 isParatext "false" @default.
- W2047159369 isRetracted "false" @default.
- W2047159369 magId "2047159369" @default.
- W2047159369 workType "article" @default.