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- W2047291282 abstract "A pulsed electron beam is used to investigate charge transport in dry thermal oxides grown in the presence of HCl. The results indicate that no radiation hardening was achieved in these oxides. Furthermore, incorporation of chlorine in the oxides is apparently accompanied by significant hole trapping." @default.
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- W2047291282 title "Effect of HCl on the electrical properties of SiO2films" @default.
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- W2047291282 doi "https://doi.org/10.1088/0022-3727/17/4/023" @default.
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