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- W2047298267 abstract "To investigate the effects of the silicon oxide process on the characteristics of the silica planar lightwave circuit (PLC) platform, we have compared two silicon oxide formation processes, thermal oxidation and plasma-enhanced chemical vapor deposition (PECVD). The thermal oxidation process for forming a silicon oxide layer on the silica platform generates surface defects and a crystobalite crystal phase, resulting in the deterioration of optical waveguide characteristics. However, the silica platform with a silicon oxide layer formed by PECVD has a transparent planar optical waveguide by suppressing the crystal growth of silica due to low processing temperatures." @default.
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- W2047298267 date "2003-06-15" @default.
- W2047298267 modified "2023-09-26" @default.
- W2047298267 title "Characteristics of Silica-on-Silicon Platform with Silicon Oxide Treatment for Hybrid Integrated Optical Module" @default.
- W2047298267 doi "https://doi.org/10.1143/jjap.42.3566" @default.
- W2047298267 hasPublicationYear "2003" @default.
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