Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047349419> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2047349419 endingPage "758" @default.
- W2047349419 startingPage "755" @default.
- W2047349419 abstract "The use of two novel etch chemistries belonging to the iodofluorocarbon family, iodotrifluoroethylene and 1-iodoheptafluoropropane, has been investigated in a dielectric etch application. These substances are being explored as potential alternatives to perfluorocompounds, a fully fluorinated class of etchants that is presently in widespread use in dielectric etch processes. Whereas perfluorocompounds have global warming properties once emitted into the atmosphere, iodofluorocarbons such as those discussed in this work are presently believed not to possess long-term environmental impacts. Under the conditions tested, the two iodofluorocarbons discussed in this work have both been found to etch silicon dioxide films readily. Note that 1-iodoheptafluoropropane has also been found to be capable of etching silicon nitride films under these conditions. An Applied Materials Precision 5000 etch tool was used in this work." @default.
- W2047349419 created "2016-06-24" @default.
- W2047349419 creator A5043765183 @default.
- W2047349419 creator A5085687046 @default.
- W2047349419 creator A5091863541 @default.
- W2047349419 date "1998-03-01" @default.
- W2047349419 modified "2023-09-27" @default.
- W2047349419 title "Plasma etching of dielectric films with novel iodofluorocarbon chemistries: Iodotrifluoroethylene and 1-iodoheptafluoropropane" @default.
- W2047349419 doi "https://doi.org/10.1116/1.581103" @default.
- W2047349419 hasPublicationYear "1998" @default.
- W2047349419 type Work @default.
- W2047349419 sameAs 2047349419 @default.
- W2047349419 citedByCount "9" @default.
- W2047349419 countsByYear W20473494192022 @default.
- W2047349419 countsByYear W20473494192023 @default.
- W2047349419 crossrefType "journal-article" @default.
- W2047349419 hasAuthorship W2047349419A5043765183 @default.
- W2047349419 hasAuthorship W2047349419A5085687046 @default.
- W2047349419 hasAuthorship W2047349419A5091863541 @default.
- W2047349419 hasConcept C100460472 @default.
- W2047349419 hasConcept C107187091 @default.
- W2047349419 hasConcept C121332964 @default.
- W2047349419 hasConcept C133386390 @default.
- W2047349419 hasConcept C159985019 @default.
- W2047349419 hasConcept C171250308 @default.
- W2047349419 hasConcept C192562407 @default.
- W2047349419 hasConcept C194760766 @default.
- W2047349419 hasConcept C2777431650 @default.
- W2047349419 hasConcept C2779089622 @default.
- W2047349419 hasConcept C2779227376 @default.
- W2047349419 hasConcept C49040817 @default.
- W2047349419 hasConcept C544956773 @default.
- W2047349419 hasConcept C62520636 @default.
- W2047349419 hasConcept C82706917 @default.
- W2047349419 hasConceptScore W2047349419C100460472 @default.
- W2047349419 hasConceptScore W2047349419C107187091 @default.
- W2047349419 hasConceptScore W2047349419C121332964 @default.
- W2047349419 hasConceptScore W2047349419C133386390 @default.
- W2047349419 hasConceptScore W2047349419C159985019 @default.
- W2047349419 hasConceptScore W2047349419C171250308 @default.
- W2047349419 hasConceptScore W2047349419C192562407 @default.
- W2047349419 hasConceptScore W2047349419C194760766 @default.
- W2047349419 hasConceptScore W2047349419C2777431650 @default.
- W2047349419 hasConceptScore W2047349419C2779089622 @default.
- W2047349419 hasConceptScore W2047349419C2779227376 @default.
- W2047349419 hasConceptScore W2047349419C49040817 @default.
- W2047349419 hasConceptScore W2047349419C544956773 @default.
- W2047349419 hasConceptScore W2047349419C62520636 @default.
- W2047349419 hasConceptScore W2047349419C82706917 @default.
- W2047349419 hasIssue "2" @default.
- W2047349419 hasLocation W20473494191 @default.
- W2047349419 hasOpenAccess W2047349419 @default.
- W2047349419 hasPrimaryLocation W20473494191 @default.
- W2047349419 hasRelatedWork W1964670930 @default.
- W2047349419 hasRelatedWork W1969256561 @default.
- W2047349419 hasRelatedWork W2003452706 @default.
- W2047349419 hasRelatedWork W2014398652 @default.
- W2047349419 hasRelatedWork W2047349419 @default.
- W2047349419 hasRelatedWork W2057185012 @default.
- W2047349419 hasRelatedWork W2061180241 @default.
- W2047349419 hasRelatedWork W2090482347 @default.
- W2047349419 hasRelatedWork W2296200299 @default.
- W2047349419 hasRelatedWork W3033139679 @default.
- W2047349419 hasVolume "16" @default.
- W2047349419 isParatext "false" @default.
- W2047349419 isRetracted "false" @default.
- W2047349419 magId "2047349419" @default.
- W2047349419 workType "article" @default.