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- W2047352547 abstract "The polarization of light scattered into directions out of the plane of incidence is calculated for microroughness, defects, or particles in or near a dielectric film on a substrate. The theories for microroughness and Rayleigh scatter in the presence of dielectric films are reviewed, and a method for calculating the Mueller matrix for scatter from multiple sources is described. The situation of a 1 micrometers thick layer of SiO<SUB>2</SUB> on a silicon substrate illuminated by a p-polarized 633 nm light at a 60 degree(s) angle of incidence is used to demonstrate the model calculations. The polarization of scattered light is calculated for scatter from roughness at each of the interfaces separately and roughness of both interfaces when those roughnesses are correlated and uncorrelated. The scatter from a single Rayleigh defect is considered as a function of the position of that defect within the dielectric film, and the scatter from a random distribution of Rayleigh defects in the layer is calculated. The capability of distinguishing amongst different scattering sources is discussed." @default.
- W2047352547 created "2016-06-24" @default.
- W2047352547 creator A5057084791 @default.
- W2047352547 date "1998-04-01" @default.
- W2047352547 modified "2023-09-24" @default.
- W2047352547 title "Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers" @default.
- W2047352547 cites W1496847388 @default.
- W2047352547 cites W1555713064 @default.
- W2047352547 cites W1666853924 @default.
- W2047352547 cites W2036229823 @default.
- W2047352547 cites W2038336049 @default.
- W2047352547 cites W2068708529 @default.
- W2047352547 cites W2083611768 @default.
- W2047352547 cites W2111622703 @default.
- W2047352547 cites W2114067026 @default.
- W2047352547 cites W2129670519 @default.
- W2047352547 cites W2169396081 @default.
- W2047352547 doi "https://doi.org/10.1117/12.304397" @default.
- W2047352547 hasPublicationYear "1998" @default.
- W2047352547 type Work @default.
- W2047352547 sameAs 2047352547 @default.
- W2047352547 citedByCount "3" @default.
- W2047352547 countsByYear W20473525472022 @default.
- W2047352547 crossrefType "proceedings-article" @default.
- W2047352547 hasAuthorship W2047352547A5057084791 @default.
- W2047352547 hasConcept C107365816 @default.
- W2047352547 hasConcept C120456961 @default.
- W2047352547 hasConcept C120665830 @default.
- W2047352547 hasConcept C121332964 @default.
- W2047352547 hasConcept C133386390 @default.
- W2047352547 hasConcept C147789679 @default.
- W2047352547 hasConcept C159985019 @default.
- W2047352547 hasConcept C171250308 @default.
- W2047352547 hasConcept C18293161 @default.
- W2047352547 hasConcept C185592680 @default.
- W2047352547 hasConcept C19067145 @default.
- W2047352547 hasConcept C191486275 @default.
- W2047352547 hasConcept C192562407 @default.
- W2047352547 hasConcept C194118358 @default.
- W2047352547 hasConcept C205049153 @default.
- W2047352547 hasConcept C28493345 @default.
- W2047352547 hasConcept C36928386 @default.
- W2047352547 hasConcept C46244369 @default.
- W2047352547 hasConcept C49040817 @default.
- W2047352547 hasConcept C544956773 @default.
- W2047352547 hasConcept C71039073 @default.
- W2047352547 hasConceptScore W2047352547C107365816 @default.
- W2047352547 hasConceptScore W2047352547C120456961 @default.
- W2047352547 hasConceptScore W2047352547C120665830 @default.
- W2047352547 hasConceptScore W2047352547C121332964 @default.
- W2047352547 hasConceptScore W2047352547C133386390 @default.
- W2047352547 hasConceptScore W2047352547C147789679 @default.
- W2047352547 hasConceptScore W2047352547C159985019 @default.
- W2047352547 hasConceptScore W2047352547C171250308 @default.
- W2047352547 hasConceptScore W2047352547C18293161 @default.
- W2047352547 hasConceptScore W2047352547C185592680 @default.
- W2047352547 hasConceptScore W2047352547C19067145 @default.
- W2047352547 hasConceptScore W2047352547C191486275 @default.
- W2047352547 hasConceptScore W2047352547C192562407 @default.
- W2047352547 hasConceptScore W2047352547C194118358 @default.
- W2047352547 hasConceptScore W2047352547C205049153 @default.
- W2047352547 hasConceptScore W2047352547C28493345 @default.
- W2047352547 hasConceptScore W2047352547C36928386 @default.
- W2047352547 hasConceptScore W2047352547C46244369 @default.
- W2047352547 hasConceptScore W2047352547C49040817 @default.
- W2047352547 hasConceptScore W2047352547C544956773 @default.
- W2047352547 hasConceptScore W2047352547C71039073 @default.
- W2047352547 hasLocation W20473525471 @default.
- W2047352547 hasOpenAccess W2047352547 @default.
- W2047352547 hasPrimaryLocation W20473525471 @default.
- W2047352547 hasRelatedWork W1843327443 @default.
- W2047352547 hasRelatedWork W1967637474 @default.
- W2047352547 hasRelatedWork W1970442269 @default.
- W2047352547 hasRelatedWork W1984126815 @default.
- W2047352547 hasRelatedWork W2070157607 @default.
- W2047352547 hasRelatedWork W2083552051 @default.
- W2047352547 hasRelatedWork W2086063458 @default.
- W2047352547 hasRelatedWork W2344538319 @default.
- W2047352547 hasRelatedWork W2347929453 @default.
- W2047352547 hasRelatedWork W4321258761 @default.
- W2047352547 isParatext "false" @default.
- W2047352547 isRetracted "false" @default.
- W2047352547 magId "2047352547" @default.
- W2047352547 workType "article" @default.