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• W2047407234 endingPage "3392" @default.
• W2047407234 startingPage "3388" @default.
• W2047407234 abstract "The process of ion cutting was used to integrate single crystalline Si layers on glass for potential active matrix flat panel display and other applications. It was found that p-Si wafers implanted at 100–150 °C with H with a dose in the order of a few times 1016 cm−2 could be readily bonded to glass substrates when both of the surfaces were properly treated and activated. The as-implanted Si wafer surface was converted from p type to n type. Upon bonding at room temperature, annealing (300 °C) and exfoliation (450 °C), the transferred Si layer on glass and the as-exfoliated surface of the implanted Si wafer remained n type. A highly defective region was observed near the top of the Si layer on glass, however the crystalline quality was nearly defect free in the deeper region of the layer. Annealing at sequentially higher temperatures led to the recovery of p type conductivity at ∼600–650 °C. The type conversion and the subsequent annealing behavior observed on the samples were rationalized in terms of ion enhanced oxygen diffusion and the presence of H-related shallow donors in the Si." @default.
• W2047407234 created "2016-06-24" @default.
• W2047407234 creator A5024556808 @default.
• W2047407234 creator A5028733892 @default.
• W2047407234 creator A5041273645 @default.
• W2047407234 creator A5051198785 @default.
• W2047407234 creator A5056479722 @default.
• W2047407234 creator A5061559260 @default.
• W2047407234 creator A5065433984 @default.
• W2047407234 creator A5066022182 @default.
• W2047407234 creator A5067496466 @default.
• W2047407234 creator A5071830537 @default.
• W2047407234 creator A5081715399 @default.
• W2047407234 creator A5084930619 @default.
• W2047407234 date "2002-08-27" @default.
• W2047407234 modified "2023-10-16" @default.
• W2047407234 title "Single crystal Si layers on glass formed by ion cutting" @default.
• W2047407234 cites W1973671776 @default.
• W2047407234 cites W2003268039 @default.
• W2047407234 cites W2011221874 @default.
• W2047407234 cites W2015090362 @default.
• W2047407234 cites W2022192729 @default.
• W2047407234 cites W2025660622 @default.
• W2047407234 cites W2028349372 @default.
• W2047407234 cites W2033854524 @default.
• W2047407234 cites W2058836962 @default.
• W2047407234 cites W2086406650 @default.
• W2047407234 cites W2087333582 @default.
• W2047407234 cites W2087524431 @default.
• W2047407234 cites W2091747192 @default.
• W2047407234 cites W2093150402 @default.
• W2047407234 cites W2102764670 @default.
• W2047407234 cites W2107929264 @default.
• W2047407234 cites W2117747791 @default.
• W2047407234 cites W2137606353 @default.
• W2047407234 doi "https://doi.org/10.1063/1.1492017" @default.
• W2047407234 hasPublicationYear "2002" @default.
• W2047407234 type Work @default.
• W2047407234 sameAs 2047407234 @default.
• W2047407234 citedByCount "25" @default.
• W2047407234 countsByYear W20474072342013 @default.
• W2047407234 countsByYear W20474072342014 @default.
• W2047407234 countsByYear W20474072342015 @default.
• W2047407234 crossrefType "journal-article" @default.
• W2047407234 hasAuthorship W2047407234A5024556808 @default.
• W2047407234 hasAuthorship W2047407234A5028733892 @default.
• W2047407234 hasAuthorship W2047407234A5041273645 @default.
• W2047407234 hasAuthorship W2047407234A5051198785 @default.
• W2047407234 hasAuthorship W2047407234A5056479722 @default.
• W2047407234 hasAuthorship W2047407234A5061559260 @default.
• W2047407234 hasAuthorship W2047407234A5065433984 @default.
• W2047407234 hasAuthorship W2047407234A5066022182 @default.
• W2047407234 hasAuthorship W2047407234A5067496466 @default.
• W2047407234 hasAuthorship W2047407234A5071830537 @default.
• W2047407234 hasAuthorship W2047407234A5081715399 @default.
• W2047407234 hasAuthorship W2047407234A5084930619 @default.
• W2047407234 hasConcept C113196181 @default.
• W2047407234 hasConcept C127413603 @default.
• W2047407234 hasConcept C131540310 @default.
• W2047407234 hasConcept C145148216 @default.
• W2047407234 hasConcept C147789679 @default.
• W2047407234 hasConcept C159985019 @default.
• W2047407234 hasConcept C160671074 @default.
• W2047407234 hasConcept C171250308 @default.
• W2047407234 hasConcept C178790620 @default.
• W2047407234 hasConcept C185592680 @default.
• W2047407234 hasConcept C192562407 @default.
• W2047407234 hasConcept C199289684 @default.
• W2047407234 hasConcept C2777855556 @default.
• W2047407234 hasConcept C2779227376 @default.
• W2047407234 hasConcept C42360764 @default.
• W2047407234 hasConcept C43617362 @default.
• W2047407234 hasConcept C49040817 @default.
• W2047407234 hasConcept C544956773 @default.
• W2047407234 hasConcept C8010536 @default.
• W2047407234 hasConceptScore W2047407234C113196181 @default.
• W2047407234 hasConceptScore W2047407234C127413603 @default.
• W2047407234 hasConceptScore W2047407234C131540310 @default.
• W2047407234 hasConceptScore W2047407234C145148216 @default.
• W2047407234 hasConceptScore W2047407234C147789679 @default.
• W2047407234 hasConceptScore W2047407234C159985019 @default.
• W2047407234 hasConceptScore W2047407234C160671074 @default.
• W2047407234 hasConceptScore W2047407234C171250308 @default.
• W2047407234 hasConceptScore W2047407234C178790620 @default.
• W2047407234 hasConceptScore W2047407234C185592680 @default.
• W2047407234 hasConceptScore W2047407234C192562407 @default.
• W2047407234 hasConceptScore W2047407234C199289684 @default.
• W2047407234 hasConceptScore W2047407234C2777855556 @default.
• W2047407234 hasConceptScore W2047407234C2779227376 @default.
• W2047407234 hasConceptScore W2047407234C42360764 @default.
• W2047407234 hasConceptScore W2047407234C43617362 @default.
• W2047407234 hasConceptScore W2047407234C49040817 @default.
• W2047407234 hasConceptScore W2047407234C544956773 @default.
• W2047407234 hasConceptScore W2047407234C8010536 @default.
• W2047407234 hasIssue "6" @default.
• W2047407234 hasLocation W20474072341 @default.
• W2047407234 hasOpenAccess W2047407234 @default.
• W2047407234 hasPrimaryLocation W20474072341 @default.

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