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• W2047482480 startingPage "S47" @default.
• W2047482480 abstract "A technology computer aided design homemade tool, IMPACT, is described. The mechanical models and the numerical implementation are presented. Details are given about the methodology to calibrate and validate the implementation. This tool is used for the analysis of the processing of a micromachined cantilever. The originality of the study lies in (i) the capability to simulate almost all the sources of stress taking into account the complex rheological behaviours of the materials, (ii) the experimental determination of the mechanical properties of various thin film materials, and (iii) the validation of the calculations by direct comparisons with the measured deformations of the cantilever." @default.
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• W2047482480 date "2005-12-13" @default.
• W2047482480 modified "2023-10-12" @default.
• W2047482480 title "Numerical analysis of the process-induced stresses in silicon microstructures: application to micromachined cantilever" @default.
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• W2047482480 doi "https://doi.org/10.1088/0964-1726/15/1/009" @default.
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