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• W2047584102 abstract "An RF-sputtered SrTiO 3 (STO) capacitor was fabricated on a GaAs substrate. Microwave characterization exhibited a relative dielectric constant ( ε r ) of 200 up to 20 GHz. This high ε r was obtained when the base electrode and the STO film were sputter-deposited in succession. A novel Pt/Ti/Pt/Ti base metal exhibited high tolerance against ion-milling, resulting in lower Ohmic resistance compared to the conventional base metal, Pt/Ti." @default.
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• W2047584102 date "1996-12-01" @default.
• W2047584102 modified "2023-09-24" @default.
• W2047584102 title "SrTiO$_{bf 3}$ Capacitor with Relative Dielectric Constant of 200 on GaAs Substrate at Microwave Frequency" @default.
• W2047584102 cites W1967001897 @default.
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• W2047584102 doi "https://doi.org/10.1143/jjap.35.l1683" @default.
• W2047584102 hasPublicationYear "1996" @default.
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