Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047595005> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2047595005 endingPage "1022" @default.
- W2047595005 startingPage "1017" @default.
- W2047595005 abstract "The ion extraction mechanism based on the self-biasing effect resulting from an RF voltage between a low pressure plasma and an electrode in contact with the plasma is studied using detailed computer simulations. The results from the simulations are compared with corresponding measurements. In particular, the influence of the frequency of the RF extraction voltage and the ion mass on the energy distribution of the extracted ion flux are investigated. The simulation of the ion kinetics in the oscillating plasma sheath in front of the electrode is shown to provide a detailed understanding of the respective ion acceleration mechanism. The simulation results supply useful information for the selection of favorable operation conditions, e.g. for establishing a uniform energy of the extracted plasma ions." @default.
- W2047595005 created "2016-06-24" @default.
- W2047595005 creator A5049496661 @default.
- W2047595005 creator A5069856075 @default.
- W2047595005 date "1996-06-01" @default.
- W2047595005 modified "2023-10-18" @default.
- W2047595005 title "Time resolved analysis of ion motion in an oscillating plasma sheath" @default.
- W2047595005 cites W1979927049 @default.
- W2047595005 cites W1990809725 @default.
- W2047595005 cites W1994316855 @default.
- W2047595005 cites W2011785357 @default.
- W2047595005 cites W2036664788 @default.
- W2047595005 cites W2042868507 @default.
- W2047595005 cites W2061814785 @default.
- W2047595005 cites W2071984008 @default.
- W2047595005 cites W2093926180 @default.
- W2047595005 cites W33438074 @default.
- W2047595005 cites W4235326677 @default.
- W2047595005 doi "https://doi.org/10.1016/0042-207x(96)00115-7" @default.
- W2047595005 hasPublicationYear "1996" @default.
- W2047595005 type Work @default.
- W2047595005 sameAs 2047595005 @default.
- W2047595005 citedByCount "14" @default.
- W2047595005 crossrefType "journal-article" @default.
- W2047595005 hasAuthorship W2047595005A5049496661 @default.
- W2047595005 hasAuthorship W2047595005A5069856075 @default.
- W2047595005 hasConcept C105812681 @default.
- W2047595005 hasConcept C121332964 @default.
- W2047595005 hasConcept C145148216 @default.
- W2047595005 hasConcept C147789679 @default.
- W2047595005 hasConcept C165801399 @default.
- W2047595005 hasConcept C17525397 @default.
- W2047595005 hasConcept C178790620 @default.
- W2047595005 hasConcept C184779094 @default.
- W2047595005 hasConcept C185592680 @default.
- W2047595005 hasConcept C192039680 @default.
- W2047595005 hasConcept C192562407 @default.
- W2047595005 hasConcept C20254490 @default.
- W2047595005 hasConcept C62520636 @default.
- W2047595005 hasConcept C82706917 @default.
- W2047595005 hasConceptScore W2047595005C105812681 @default.
- W2047595005 hasConceptScore W2047595005C121332964 @default.
- W2047595005 hasConceptScore W2047595005C145148216 @default.
- W2047595005 hasConceptScore W2047595005C147789679 @default.
- W2047595005 hasConceptScore W2047595005C165801399 @default.
- W2047595005 hasConceptScore W2047595005C17525397 @default.
- W2047595005 hasConceptScore W2047595005C178790620 @default.
- W2047595005 hasConceptScore W2047595005C184779094 @default.
- W2047595005 hasConceptScore W2047595005C185592680 @default.
- W2047595005 hasConceptScore W2047595005C192039680 @default.
- W2047595005 hasConceptScore W2047595005C192562407 @default.
- W2047595005 hasConceptScore W2047595005C20254490 @default.
- W2047595005 hasConceptScore W2047595005C62520636 @default.
- W2047595005 hasConceptScore W2047595005C82706917 @default.
- W2047595005 hasIssue "6-8" @default.
- W2047595005 hasLocation W20475950051 @default.
- W2047595005 hasOpenAccess W2047595005 @default.
- W2047595005 hasPrimaryLocation W20475950051 @default.
- W2047595005 hasRelatedWork W1617534506 @default.
- W2047595005 hasRelatedWork W1981954100 @default.
- W2047595005 hasRelatedWork W1983015121 @default.
- W2047595005 hasRelatedWork W1986237822 @default.
- W2047595005 hasRelatedWork W2036309773 @default.
- W2047595005 hasRelatedWork W2048189949 @default.
- W2047595005 hasRelatedWork W2073189845 @default.
- W2047595005 hasRelatedWork W2080442071 @default.
- W2047595005 hasRelatedWork W4225156743 @default.
- W2047595005 hasRelatedWork W4280512653 @default.
- W2047595005 hasVolume "47" @default.
- W2047595005 isParatext "false" @default.
- W2047595005 isRetracted "false" @default.
- W2047595005 magId "2047595005" @default.
- W2047595005 workType "article" @default.