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• W2047647789 abstract "Abstract In this paper we describe the design and fabrication process of a magneto-surface-acoustic-waves (MSAWs) microdevice using Fe 70 B 15 Si 15 amorphous thin films and Fe 70 B 15 Si 15 /SiO 2 -type multilayers as active media. This simple and small device, able to be used as a sensor or implemented as a part of the magnetomechanical sensing integrated systems, is fabricated using thin film technology combined with photolithographic techniques. In order to use magnetostrictive Fe-metalloid amorphous thin films and (Fe-based magnetostrictive alloy/insulator) N multilayers as active media for (MSAWs) microdevices, the magnetic (saturation specific magnetization σ s and magnetic anisotropy constant k u ) and magnetoelastic (ME) (saturation magnetostriction λ s , magnetoelastic coupling coefficient b γ ,2 , magnetostrictive strain coefficient D and Δ E / E ratio) properties which determine their performance are studied. The possible use of MSAWs microdevice fabricated by us in microsensors applications is illustrated." @default.
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• W2047647789 date "2001-06-01" @default.
• W2047647789 modified "2023-10-01" @default.
• W2047647789 title "Magneto-surface-acoustic-waves microdevice using thin film technology: design and fabrication process" @default.
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• W2047647789 doi "https://doi.org/10.1016/s0924-4247(01)00500-3" @default.
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