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- W2047814831 abstract "The growth of polycrystalline AlN film at a rate of 60 nm·min -1 was accomplished at a substrate temperature of 550°C by a coaxial-line-type microwave plasma chemical vapor deposition (CVD) method using the AlBr 3 -H 2 -N 2 gas system. Excellent c -axis orientation was observed on the film having a half-width rocking curve of (001) AlN ( Δ θ 50 ) of 2.1 degrees. No carbon or bromine was detected by the AES measurements." @default.
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- W2047814831 date "1990-02-01" @default.
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- W2047814831 title "Low-Temperature Growth of Polycrystalline AlN Films by Microwave Plasma CVD" @default.
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