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- W2047822963 abstract "An analytical model of the quasistatic behavior of galvanic piezoelectric microelectromechanical system (MEMS) switches is described. The model is based on the Euler–Bernoulli beam equation. Two geometries often used in galvanic switches are investigated: the single clamped cantilever (SCC) and the double clamped beam (DCB). The effects from residual stress and thermal expansion are also taken into account. They are both described by an effective initial gap and an effective bending stiffness in the case of the SCC and the DCB, respectively. Using the analytical model, the beam is optimized with respect to contact force and restoring force. Finally, the scaling behavior of piezoelectric MEMS switches is investigated. The analytical model is benchmarked against the results from finite-element-method simulations, showing good agreement." @default.
- W2047822963 created "2016-06-24" @default.
- W2047822963 creator A5051114751 @default.
- W2047822963 date "2009-11-15" @default.
- W2047822963 modified "2023-09-24" @default.
- W2047822963 title "Analytical model of the quasistatic mechanical behavior of galvanic piezoelectric microelectromechanical system switches" @default.
- W2047822963 cites W2018817588 @default.
- W2047822963 cites W2132894602 @default.
- W2047822963 cites W2149445069 @default.
- W2047822963 cites W2161847487 @default.
- W2047822963 cites W2163034082 @default.
- W2047822963 cites W4253749718 @default.
- W2047822963 cites W4375208153 @default.
- W2047822963 doi "https://doi.org/10.1063/1.3255945" @default.
- W2047822963 hasPublicationYear "2009" @default.
- W2047822963 type Work @default.
- W2047822963 sameAs 2047822963 @default.
- W2047822963 citedByCount "6" @default.
- W2047822963 countsByYear W20478229632012 @default.
- W2047822963 countsByYear W20478229632013 @default.
- W2047822963 countsByYear W20478229632019 @default.
- W2047822963 countsByYear W20478229632022 @default.
- W2047822963 crossrefType "journal-article" @default.
- W2047822963 hasAuthorship W2047822963A5051114751 @default.
- W2047822963 hasConcept C100082104 @default.
- W2047822963 hasConcept C121332964 @default.
- W2047822963 hasConcept C127413603 @default.
- W2047822963 hasConcept C128172907 @default.
- W2047822963 hasConcept C135628077 @default.
- W2047822963 hasConcept C141354745 @default.
- W2047822963 hasConcept C159985019 @default.
- W2047822963 hasConcept C168834538 @default.
- W2047822963 hasConcept C191897082 @default.
- W2047822963 hasConcept C192562407 @default.
- W2047822963 hasConcept C2524010 @default.
- W2047822963 hasConcept C2779372316 @default.
- W2047822963 hasConcept C29633239 @default.
- W2047822963 hasConcept C33923547 @default.
- W2047822963 hasConcept C37977207 @default.
- W2047822963 hasConcept C4708273 @default.
- W2047822963 hasConcept C49040817 @default.
- W2047822963 hasConcept C57879066 @default.
- W2047822963 hasConcept C66938386 @default.
- W2047822963 hasConcept C87210426 @default.
- W2047822963 hasConcept C97355855 @default.
- W2047822963 hasConcept C99844830 @default.
- W2047822963 hasConceptScore W2047822963C100082104 @default.
- W2047822963 hasConceptScore W2047822963C121332964 @default.
- W2047822963 hasConceptScore W2047822963C127413603 @default.
- W2047822963 hasConceptScore W2047822963C128172907 @default.
- W2047822963 hasConceptScore W2047822963C135628077 @default.
- W2047822963 hasConceptScore W2047822963C141354745 @default.
- W2047822963 hasConceptScore W2047822963C159985019 @default.
- W2047822963 hasConceptScore W2047822963C168834538 @default.
- W2047822963 hasConceptScore W2047822963C191897082 @default.
- W2047822963 hasConceptScore W2047822963C192562407 @default.
- W2047822963 hasConceptScore W2047822963C2524010 @default.
- W2047822963 hasConceptScore W2047822963C2779372316 @default.
- W2047822963 hasConceptScore W2047822963C29633239 @default.
- W2047822963 hasConceptScore W2047822963C33923547 @default.
- W2047822963 hasConceptScore W2047822963C37977207 @default.
- W2047822963 hasConceptScore W2047822963C4708273 @default.
- W2047822963 hasConceptScore W2047822963C49040817 @default.
- W2047822963 hasConceptScore W2047822963C57879066 @default.
- W2047822963 hasConceptScore W2047822963C66938386 @default.
- W2047822963 hasConceptScore W2047822963C87210426 @default.
- W2047822963 hasConceptScore W2047822963C97355855 @default.
- W2047822963 hasConceptScore W2047822963C99844830 @default.
- W2047822963 hasIssue "10" @default.
- W2047822963 hasLocation W20478229631 @default.
- W2047822963 hasOpenAccess W2047822963 @default.
- W2047822963 hasPrimaryLocation W20478229631 @default.
- W2047822963 hasRelatedWork W2164267218 @default.
- W2047822963 hasRelatedWork W2168654669 @default.
- W2047822963 hasRelatedWork W2355535078 @default.
- W2047822963 hasRelatedWork W2540112629 @default.
- W2047822963 hasRelatedWork W292273025 @default.
- W2047822963 hasRelatedWork W3085711136 @default.
- W2047822963 hasRelatedWork W4288069843 @default.
- W2047822963 hasRelatedWork W4288459197 @default.
- W2047822963 hasRelatedWork W4327605557 @default.
- W2047822963 hasRelatedWork W67035273 @default.
- W2047822963 hasVolume "106" @default.
- W2047822963 isParatext "false" @default.
- W2047822963 isRetracted "false" @default.
- W2047822963 magId "2047822963" @default.
- W2047822963 workType "article" @default.