Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047868545> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2047868545 endingPage "149" @default.
- W2047868545 startingPage "143" @default.
- W2047868545 abstract "The polycrystalline diamond films were deposited on silicon substrates by the microwave plasma chemical vapor deposition (MPCVD) system. Two kinds of pretreatment techniques, diamond paste nucleation method and diamond powder/photoresist mixture nucleation method, under two optimal synthesis conditions were used respectively, for 1 in. and 4 in. diameter polycrystalline diamond films on silicon substrates. It was found that the diamond film texture was toward (111) face, which was pretreated on the 1 diameter silicon by the diamond paste nucleation method, under the high temperature and high pressure condition and no oxygen (O) signal was detected for the as-deposited undoped diamond film. The (100) textured diamond film, which was pretreated on the 4 diameter silicon by the diamond powder/photoresist mixture nucleation method, was synthesized under the low temperature and low pressure condition, the oxygen (O) signal was observed for the as-deposited undoped diamond film. After deposition, the polycrystalline diamond films were doped by boron ion implantation (80 Kev, 5 × 1015 cm−2) and were annealed under 800°C) in N2 for 1 h. The qualities of the (111) and (100) textured diamond films were both degraded after the boron ion implantation. The oxidized phenomena increased a lot for the undoped and the boron-doped diamond films which were annealed at 800°C for both of the (111) and (100) textured diamond films. However, the qualities of the (111) undoped and boron-doped diamond films were found to be improved after the high temperature annealing process. For the (100) undoped and boron-doped diamond films, on the contrary, the diamond films were degraded after the high temperature annealing process." @default.
- W2047868545 created "2016-06-24" @default.
- W2047868545 creator A5020142698 @default.
- W2047868545 creator A5071458991 @default.
- W2047868545 date "1999-08-01" @default.
- W2047868545 modified "2023-10-16" @default.
- W2047868545 title "The physical characterization of the (111) and (100) textured diamond films synthesized by two optimal conditions" @default.
- W2047868545 cites W1966862836 @default.
- W2047868545 cites W1968406755 @default.
- W2047868545 cites W1977062833 @default.
- W2047868545 cites W1977336820 @default.
- W2047868545 cites W1979363876 @default.
- W2047868545 cites W1991703456 @default.
- W2047868545 cites W1994604849 @default.
- W2047868545 cites W1998370272 @default.
- W2047868545 cites W2015872531 @default.
- W2047868545 cites W2016991651 @default.
- W2047868545 cites W2022764146 @default.
- W2047868545 cites W2027360590 @default.
- W2047868545 cites W2035011850 @default.
- W2047868545 cites W2045430420 @default.
- W2047868545 cites W2067602311 @default.
- W2047868545 cites W2085090230 @default.
- W2047868545 cites W659274447 @default.
- W2047868545 doi "https://doi.org/10.1016/s0254-0584(99)00079-6" @default.
- W2047868545 hasPublicationYear "1999" @default.
- W2047868545 type Work @default.
- W2047868545 sameAs 2047868545 @default.
- W2047868545 citedByCount "5" @default.
- W2047868545 countsByYear W20478685452014 @default.
- W2047868545 crossrefType "journal-article" @default.
- W2047868545 hasAuthorship W2047868545A5020142698 @default.
- W2047868545 hasAuthorship W2047868545A5071458991 @default.
- W2047868545 hasConcept C113196181 @default.
- W2047868545 hasConcept C127413603 @default.
- W2047868545 hasConcept C159985019 @default.
- W2047868545 hasConcept C160671074 @default.
- W2047868545 hasConcept C162882748 @default.
- W2047868545 hasConcept C171250308 @default.
- W2047868545 hasConcept C178790620 @default.
- W2047868545 hasConcept C185592680 @default.
- W2047868545 hasConcept C19067145 @default.
- W2047868545 hasConcept C192562407 @default.
- W2047868545 hasConcept C2776921476 @default.
- W2047868545 hasConcept C2777855556 @default.
- W2047868545 hasConcept C42360764 @default.
- W2047868545 hasConcept C49040817 @default.
- W2047868545 hasConcept C501308230 @default.
- W2047868545 hasConcept C544956773 @default.
- W2047868545 hasConcept C57410435 @default.
- W2047868545 hasConcept C61048295 @default.
- W2047868545 hasConcept C75937256 @default.
- W2047868545 hasConceptScore W2047868545C113196181 @default.
- W2047868545 hasConceptScore W2047868545C127413603 @default.
- W2047868545 hasConceptScore W2047868545C159985019 @default.
- W2047868545 hasConceptScore W2047868545C160671074 @default.
- W2047868545 hasConceptScore W2047868545C162882748 @default.
- W2047868545 hasConceptScore W2047868545C171250308 @default.
- W2047868545 hasConceptScore W2047868545C178790620 @default.
- W2047868545 hasConceptScore W2047868545C185592680 @default.
- W2047868545 hasConceptScore W2047868545C19067145 @default.
- W2047868545 hasConceptScore W2047868545C192562407 @default.
- W2047868545 hasConceptScore W2047868545C2776921476 @default.
- W2047868545 hasConceptScore W2047868545C2777855556 @default.
- W2047868545 hasConceptScore W2047868545C42360764 @default.
- W2047868545 hasConceptScore W2047868545C49040817 @default.
- W2047868545 hasConceptScore W2047868545C501308230 @default.
- W2047868545 hasConceptScore W2047868545C544956773 @default.
- W2047868545 hasConceptScore W2047868545C57410435 @default.
- W2047868545 hasConceptScore W2047868545C61048295 @default.
- W2047868545 hasConceptScore W2047868545C75937256 @default.
- W2047868545 hasIssue "2" @default.
- W2047868545 hasLocation W20478685451 @default.
- W2047868545 hasOpenAccess W2047868545 @default.
- W2047868545 hasPrimaryLocation W20478685451 @default.
- W2047868545 hasRelatedWork W1601960873 @default.
- W2047868545 hasRelatedWork W1974514802 @default.
- W2047868545 hasRelatedWork W2043260813 @default.
- W2047868545 hasRelatedWork W2045997461 @default.
- W2047868545 hasRelatedWork W2062823550 @default.
- W2047868545 hasRelatedWork W2085619230 @default.
- W2047868545 hasRelatedWork W2146298506 @default.
- W2047868545 hasRelatedWork W2317351545 @default.
- W2047868545 hasRelatedWork W2375312980 @default.
- W2047868545 hasRelatedWork W4366176053 @default.
- W2047868545 hasVolume "60" @default.
- W2047868545 isParatext "false" @default.
- W2047868545 isRetracted "false" @default.
- W2047868545 magId "2047868545" @default.
- W2047868545 workType "article" @default.