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• W2047877477 abstract "The mechanical and optical properties of carbon films grown using direct gas deposition from a fast atom beam source are compared with those of films grown by evaporation of graphite in butane and argon d.c. or low frequency r.f. plasmas. The characteristics are found to be highly dependent on the substrate material (glass or tool steel) and are also related to process conditions, such as bias voltage and hydrogen to carbon ratio in the plasma." @default.
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• W2047877477 date "1990-12-01" @default.
• W2047877477 modified "2023-10-09" @default.
• W2047877477 title "A comparison of the properties of hard carbon films produced by direct gas deposition and plasma-assisted evaporation" @default.
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• W2047877477 doi "https://doi.org/10.1016/0257-8972(90)90063-i" @default.
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