FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047878538> ?p ?o ?g. }

• W2047878538 endingPage "562" @default.
• W2047878538 startingPage "557" @default.
• W2047878538 abstract "(Ti, Al)N films were deposited by a new off-plane double bend filtered cathodic vacuum arc technique under a nitrogen atmosphere at room temperature. Scanning electron microscopy and atomic force microscopy were used to observe the surface morphology of the deposited films. X-ray photoelectron spectroscopy was used to determine the composition and bonding structure of the deposited films. A scratch test was used to access the film adhesion. The deposited films are atomically smooth and particle free. The Al/Ti atomic ratio in the deposited films is around 1. The films deposited at the pressure of 1×10−4 Torr are composed of metallic Ti and Al phase and a small amount of (Ti, Al)N phase. For the films deposited at the pressure of 1.5×10−3 Torr, (Ti, Al)N phases are dominant. The scratch test indicates that the critical load increases with increasing deposition pressure up to 1.5×10−3 Torr, then decrease drastically with the further increase of deposition pressure. As substrate bias is increased, critical load increases and reachs the maximum at the bias of 200 V, then decreases at higher bias. The hardness of the deposited films is found to be the main factor that affects the critical load of the thin films." @default.
• W2047878538 created "2016-06-24" @default.
• W2047878538 creator A5003875522 @default.
• W2047878538 creator A5009770522 @default.
• W2047878538 creator A5042913484 @default.
• W2047878538 creator A5067293654 @default.
• W2047878538 creator A5068315243 @default.
• W2047878538 date "2001-03-01" @default.
• W2047878538 modified "2023-10-16" @default.
• W2047878538 title "Characterization of (Ti, Al)N films deposited by off-plane double bend filtered cathodic vacuum arc" @default.
• W2047878538 cites W1964790783 @default.
• W2047878538 cites W1985184562 @default.
• W2047878538 cites W1995788934 @default.
• W2047878538 cites W1997824251 @default.
• W2047878538 cites W1999933443 @default.
• W2047878538 cites W2003804702 @default.
• W2047878538 cites W2029721569 @default.
• W2047878538 cites W2043997040 @default.
• W2047878538 cites W2046010281 @default.
• W2047878538 cites W2047131187 @default.
• W2047878538 cites W2049095814 @default.
• W2047878538 cites W2050202470 @default.
• W2047878538 cites W2051993511 @default.
• W2047878538 cites W2054331114 @default.
• W2047878538 cites W2063069853 @default.
• W2047878538 cites W2067229973 @default.
• W2047878538 cites W2067276097 @default.
• W2047878538 cites W2075348037 @default.
• W2047878538 cites W2086305291 @default.
• W2047878538 cites W2093077319 @default.
• W2047878538 cites W2094993900 @default.
• W2047878538 cites W2139852789 @default.
• W2047878538 doi "https://doi.org/10.1116/1.1351063" @default.
• W2047878538 hasPublicationYear "2001" @default.
• W2047878538 type Work @default.
• W2047878538 sameAs 2047878538 @default.
• W2047878538 citedByCount "2" @default.
• W2047878538 crossrefType "journal-article" @default.
• W2047878538 hasAuthorship W2047878538A5003875522 @default.
• W2047878538 hasAuthorship W2047878538A5009770522 @default.
• W2047878538 hasAuthorship W2047878538A5042913484 @default.
• W2047878538 hasAuthorship W2047878538A5067293654 @default.
• W2047878538 hasAuthorship W2047878538A5068315243 @default.
• W2047878538 hasConcept C111368507 @default.
• W2047878538 hasConcept C113196181 @default.
• W2047878538 hasConcept C121332964 @default.
• W2047878538 hasConcept C127313418 @default.
• W2047878538 hasConcept C127413603 @default.
• W2047878538 hasConcept C147789679 @default.
• W2047878538 hasConcept C151730666 @default.
• W2047878538 hasConcept C159985019 @default.
• W2047878538 hasConcept C171250308 @default.
• W2047878538 hasConcept C175708663 @default.
• W2047878538 hasConcept C185592680 @default.
• W2047878538 hasConcept C19067145 @default.
• W2047878538 hasConcept C191897082 @default.
• W2047878538 hasConcept C192562407 @default.
• W2047878538 hasConcept C26771246 @default.
• W2047878538 hasConcept C2777289219 @default.
• W2047878538 hasConcept C2816523 @default.
• W2047878538 hasConcept C30646810 @default.
• W2047878538 hasConcept C42360764 @default.
• W2047878538 hasConcept C43617362 @default.
• W2047878538 hasConcept C44441586 @default.
• W2047878538 hasConcept C49110097 @default.
• W2047878538 hasConcept C64297162 @default.
• W2047878538 hasConcept C86803240 @default.
• W2047878538 hasConcept C97355855 @default.
• W2047878538 hasConceptScore W2047878538C111368507 @default.
• W2047878538 hasConceptScore W2047878538C113196181 @default.
• W2047878538 hasConceptScore W2047878538C121332964 @default.
• W2047878538 hasConceptScore W2047878538C127313418 @default.
• W2047878538 hasConceptScore W2047878538C127413603 @default.
• W2047878538 hasConceptScore W2047878538C147789679 @default.
• W2047878538 hasConceptScore W2047878538C151730666 @default.
• W2047878538 hasConceptScore W2047878538C159985019 @default.
• W2047878538 hasConceptScore W2047878538C171250308 @default.
• W2047878538 hasConceptScore W2047878538C175708663 @default.
• W2047878538 hasConceptScore W2047878538C185592680 @default.
• W2047878538 hasConceptScore W2047878538C19067145 @default.
• W2047878538 hasConceptScore W2047878538C191897082 @default.
• W2047878538 hasConceptScore W2047878538C192562407 @default.
• W2047878538 hasConceptScore W2047878538C26771246 @default.
• W2047878538 hasConceptScore W2047878538C2777289219 @default.
• W2047878538 hasConceptScore W2047878538C2816523 @default.
• W2047878538 hasConceptScore W2047878538C30646810 @default.
• W2047878538 hasConceptScore W2047878538C42360764 @default.
• W2047878538 hasConceptScore W2047878538C43617362 @default.
• W2047878538 hasConceptScore W2047878538C44441586 @default.
• W2047878538 hasConceptScore W2047878538C49110097 @default.
• W2047878538 hasConceptScore W2047878538C64297162 @default.
• W2047878538 hasConceptScore W2047878538C86803240 @default.
• W2047878538 hasConceptScore W2047878538C97355855 @default.
• W2047878538 hasIssue "2" @default.
• W2047878538 hasLocation W20478785381 @default.
• W2047878538 hasOpenAccess W2047878538 @default.
• W2047878538 hasPrimaryLocation W20478785381 @default.
• W2047878538 hasRelatedWork W1512319868 @default.

• next