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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047888940> ?p ?o ?g. }

• W2047888940 abstract "The investigation of boron delta layers by tomographic atom probe (3DAP) is used to demonstrate that a depth profiling resolution of 0.9 nm (full width at half maximum) can be achieved. Results are compared with measurements provided by secondary ion mass spectrometry. The steepness is found to be below 1 nm/decade. In addition, silicon atomic planes are resolved in the real space demonstrating an in-depth spatial resolution of the 3DAP below 0.2 nm." @default.
• W2047888940 created "2016-06-24" @default.
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• W2047888940 date "2009-08-15" @default.
• W2047888940 modified "2023-10-14" @default.
• W2047888940 title "Depth resolution function of the laser assisted tomographic atom probe in the investigation of semiconductors" @default.
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• W2047888940 doi "https://doi.org/10.1063/1.3186617" @default.
• W2047888940 hasPublicationYear "2009" @default.
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