Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047902146> ?p ?o ?g. }
- W2047902146 abstract "The plasma of a high power impulse magnetron sputtering system has been investigated using a time-of-flight spectrometer. The target materials included high sputter yield materials (Cu, Ag), transition metals (Nb, Cr, Ti), and carbon (graphite); the sputtering gases were argon, krypton, and nitrogen, and two different target thicknesses were selected to consider the role of the magnetic field strength. Measurements for selected combinations of those parameters give quantitative information on the transition from gas-dominated to metal-dominated (self-sputtering) plasma, on the fractions of ion charge states, and in the case of molecular gases, on the fraction of atomic and molecular ions." @default.
- W2047902146 created "2016-06-24" @default.
- W2047902146 creator A5055229721 @default.
- W2047902146 creator A5069665776 @default.
- W2047902146 date "2009-05-01" @default.
- W2047902146 modified "2023-10-18" @default.
- W2047902146 title "Evolution of the plasma composition of a high power impulse magnetron sputtering system studied with a time-of-flight spectrometer" @default.
- W2047902146 cites W1977290005 @default.
- W2047902146 cites W1981606343 @default.
- W2047902146 cites W1988133629 @default.
- W2047902146 cites W1992075164 @default.
- W2047902146 cites W1992095207 @default.
- W2047902146 cites W2003237814 @default.
- W2047902146 cites W2003939019 @default.
- W2047902146 cites W2010378341 @default.
- W2047902146 cites W2013738874 @default.
- W2047902146 cites W2019800713 @default.
- W2047902146 cites W2025801567 @default.
- W2047902146 cites W2026142059 @default.
- W2047902146 cites W2030999196 @default.
- W2047902146 cites W2035877064 @default.
- W2047902146 cites W2037654956 @default.
- W2047902146 cites W2044061743 @default.
- W2047902146 cites W2051394489 @default.
- W2047902146 cites W2051944828 @default.
- W2047902146 cites W2054684756 @default.
- W2047902146 cites W2057693531 @default.
- W2047902146 cites W2075230502 @default.
- W2047902146 cites W2076402128 @default.
- W2047902146 cites W2078301132 @default.
- W2047902146 cites W2080711303 @default.
- W2047902146 cites W2084461123 @default.
- W2047902146 cites W2090536167 @default.
- W2047902146 cites W2107274894 @default.
- W2047902146 cites W2137879896 @default.
- W2047902146 cites W2155725014 @default.
- W2047902146 cites W2164240866 @default.
- W2047902146 cites W2171095408 @default.
- W2047902146 cites W2492640099 @default.
- W2047902146 doi "https://doi.org/10.1063/1.3125443" @default.
- W2047902146 hasPublicationYear "2009" @default.
- W2047902146 type Work @default.
- W2047902146 sameAs 2047902146 @default.
- W2047902146 citedByCount "37" @default.
- W2047902146 countsByYear W20479021462012 @default.
- W2047902146 countsByYear W20479021462013 @default.
- W2047902146 countsByYear W20479021462014 @default.
- W2047902146 countsByYear W20479021462015 @default.
- W2047902146 countsByYear W20479021462016 @default.
- W2047902146 countsByYear W20479021462017 @default.
- W2047902146 countsByYear W20479021462018 @default.
- W2047902146 countsByYear W20479021462019 @default.
- W2047902146 countsByYear W20479021462020 @default.
- W2047902146 countsByYear W20479021462021 @default.
- W2047902146 countsByYear W20479021462022 @default.
- W2047902146 countsByYear W20479021462023 @default.
- W2047902146 crossrefType "journal-article" @default.
- W2047902146 hasAuthorship W2047902146A5055229721 @default.
- W2047902146 hasAuthorship W2047902146A5069665776 @default.
- W2047902146 hasBestOaLocation W20479021462 @default.
- W2047902146 hasConcept C113196181 @default.
- W2047902146 hasConcept C120665830 @default.
- W2047902146 hasConcept C121332964 @default.
- W2047902146 hasConcept C145148216 @default.
- W2047902146 hasConcept C171250308 @default.
- W2047902146 hasConcept C178790620 @default.
- W2047902146 hasConcept C184779094 @default.
- W2047902146 hasConcept C185544564 @default.
- W2047902146 hasConcept C185592680 @default.
- W2047902146 hasConcept C19067145 @default.
- W2047902146 hasConcept C192562407 @default.
- W2047902146 hasConcept C22423302 @default.
- W2047902146 hasConcept C33390570 @default.
- W2047902146 hasConcept C43617362 @default.
- W2047902146 hasConcept C521692839 @default.
- W2047902146 hasConcept C547737533 @default.
- W2047902146 hasConcept C61427134 @default.
- W2047902146 hasConcept C82706917 @default.
- W2047902146 hasConcept C97892325 @default.
- W2047902146 hasConcept C98960154 @default.
- W2047902146 hasConceptScore W2047902146C113196181 @default.
- W2047902146 hasConceptScore W2047902146C120665830 @default.
- W2047902146 hasConceptScore W2047902146C121332964 @default.
- W2047902146 hasConceptScore W2047902146C145148216 @default.
- W2047902146 hasConceptScore W2047902146C171250308 @default.
- W2047902146 hasConceptScore W2047902146C178790620 @default.
- W2047902146 hasConceptScore W2047902146C184779094 @default.
- W2047902146 hasConceptScore W2047902146C185544564 @default.
- W2047902146 hasConceptScore W2047902146C185592680 @default.
- W2047902146 hasConceptScore W2047902146C19067145 @default.
- W2047902146 hasConceptScore W2047902146C192562407 @default.
- W2047902146 hasConceptScore W2047902146C22423302 @default.
- W2047902146 hasConceptScore W2047902146C33390570 @default.
- W2047902146 hasConceptScore W2047902146C43617362 @default.
- W2047902146 hasConceptScore W2047902146C521692839 @default.
- W2047902146 hasConceptScore W2047902146C547737533 @default.
- W2047902146 hasConceptScore W2047902146C61427134 @default.
- W2047902146 hasConceptScore W2047902146C82706917 @default.
- W2047902146 hasConceptScore W2047902146C97892325 @default.
- W2047902146 hasConceptScore W2047902146C98960154 @default.