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• W2047923560 endingPage "L1394" @default.
• W2047923560 startingPage "L1394" @default.
• W2047923560 abstract "In this letter, a Ka-band cavity resonator using micromachining process is presented. A two-port cavity resonator is designed using the three-dimensional (3-D) design software, HP HFSS. The cavity resonator is fabricated on a Si substrate and bonded with a Quartz wafer. The resonator shows the resonant frequency of 39 GHz, the insertion loss of 4.6 dB, and the loaded quality factor ( Q L ) and unloaded quality factor ( Q U ) of 44.3 and 107, respectively." @default.
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• W2047923560 date "2001-12-01" @default.
• W2047923560 modified "2023-10-06" @default.
• W2047923560 title "A Micromachined Millimeter-Wave Cavity Resonator on Silicon and Quartz Substrates" @default.
• W2047923560 cites W2017176196 @default.
• W2047923560 cites W2135479677 @default.
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• W2047923560 doi "https://doi.org/10.1143/jjap.40.l1394" @default.
• W2047923560 hasPublicationYear "2001" @default.
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