Matches in SemOpenAlex for { <https://semopenalex.org/work/W2047955326> ?p ?o ?g. }
- W2047955326 endingPage "382" @default.
- W2047955326 startingPage "376" @default.
- W2047955326 abstract "Ti1 − x − yAlxSiyNz (0.02 ≤ x ≤ 0.46, 0.02 ≤ y ≤ 0.28, and 1.08 ≤ z ≤ 1.29) thin films were grown on cemented carbide substrates in an industrial scale cathodic arc evaporation system using TiAl, TiSi, and TiAlSi cathodes in a N2 atmosphere. The microstructure of the as-deposited films changes from nanocrystalline to amorphous by addition of Al and Si to TiN. Upon incorporation of 12 at.% Si and 18 at.% Al, the films assume an X-ray amorphous state. Post-deposition anneals show that the films are thermally stable up to 900 °C. The films exhibit age hardening up to 1100 °C with an increase in hardness from 19.4 GPa for as-deposited films to 27.1 GPa at 1100 °C. At 1100 °C out-diffusion of Co and W from the substrate occur, and the films crystallize into c-TiN and h-AlN." @default.
- W2047955326 created "2016-06-24" @default.
- W2047955326 creator A5014425520 @default.
- W2047955326 creator A5020723421 @default.
- W2047955326 creator A5039646297 @default.
- W2047955326 creator A5043991695 @default.
- W2047955326 creator A5059039362 @default.
- W2047955326 creator A5086073947 @default.
- W2047955326 date "2013-11-01" @default.
- W2047955326 modified "2023-10-18" @default.
- W2047955326 title "Growth of hard amorphous TiAlSiN thin films by cathodic arc evaporation" @default.
- W2047955326 cites W1613919826 @default.
- W2047955326 cites W1963768428 @default.
- W2047955326 cites W1966276326 @default.
- W2047955326 cites W1966782256 @default.
- W2047955326 cites W1968402614 @default.
- W2047955326 cites W1969879151 @default.
- W2047955326 cites W1973023008 @default.
- W2047955326 cites W1973111430 @default.
- W2047955326 cites W1974237175 @default.
- W2047955326 cites W1981338907 @default.
- W2047955326 cites W1982554375 @default.
- W2047955326 cites W1989538796 @default.
- W2047955326 cites W1991973359 @default.
- W2047955326 cites W1994642808 @default.
- W2047955326 cites W2018349922 @default.
- W2047955326 cites W2020247162 @default.
- W2047955326 cites W2033680840 @default.
- W2047955326 cites W2040985842 @default.
- W2047955326 cites W2047615267 @default.
- W2047955326 cites W2050531448 @default.
- W2047955326 cites W2057480832 @default.
- W2047955326 cites W2057871243 @default.
- W2047955326 cites W2057892646 @default.
- W2047955326 cites W2066307423 @default.
- W2047955326 cites W2067101199 @default.
- W2047955326 cites W2078725544 @default.
- W2047955326 cites W2079360748 @default.
- W2047955326 cites W2079944220 @default.
- W2047955326 cites W2085448589 @default.
- W2047955326 cites W2086933933 @default.
- W2047955326 cites W2094251353 @default.
- W2047955326 cites W2114873572 @default.
- W2047955326 cites W2155180336 @default.
- W2047955326 cites W4250957677 @default.
- W2047955326 doi "https://doi.org/10.1016/j.surfcoat.2013.07.014" @default.
- W2047955326 hasPublicationYear "2013" @default.
- W2047955326 type Work @default.
- W2047955326 sameAs 2047955326 @default.
- W2047955326 citedByCount "16" @default.
- W2047955326 countsByYear W20479553262014 @default.
- W2047955326 countsByYear W20479553262015 @default.
- W2047955326 countsByYear W20479553262018 @default.
- W2047955326 countsByYear W20479553262019 @default.
- W2047955326 countsByYear W20479553262020 @default.
- W2047955326 countsByYear W20479553262021 @default.
- W2047955326 countsByYear W20479553262022 @default.
- W2047955326 countsByYear W20479553262023 @default.
- W2047955326 crossrefType "journal-article" @default.
- W2047955326 hasAuthorship W2047955326A5014425520 @default.
- W2047955326 hasAuthorship W2047955326A5020723421 @default.
- W2047955326 hasAuthorship W2047955326A5039646297 @default.
- W2047955326 hasAuthorship W2047955326A5043991695 @default.
- W2047955326 hasAuthorship W2047955326A5059039362 @default.
- W2047955326 hasAuthorship W2047955326A5086073947 @default.
- W2047955326 hasBestOaLocation W20479553262 @default.
- W2047955326 hasConcept C111368507 @default.
- W2047955326 hasConcept C113196181 @default.
- W2047955326 hasConcept C121332964 @default.
- W2047955326 hasConcept C127313418 @default.
- W2047955326 hasConcept C140676511 @default.
- W2047955326 hasConcept C147789679 @default.
- W2047955326 hasConcept C171250308 @default.
- W2047955326 hasConcept C17525397 @default.
- W2047955326 hasConcept C185592680 @default.
- W2047955326 hasConcept C19067145 @default.
- W2047955326 hasConcept C191897082 @default.
- W2047955326 hasConcept C192562407 @default.
- W2047955326 hasConcept C205871581 @default.
- W2047955326 hasConcept C2777289219 @default.
- W2047955326 hasConcept C2779715934 @default.
- W2047955326 hasConcept C43617362 @default.
- W2047955326 hasConcept C525849907 @default.
- W2047955326 hasConcept C5335593 @default.
- W2047955326 hasConcept C56052488 @default.
- W2047955326 hasConcept C61441594 @default.
- W2047955326 hasConcept C67009288 @default.
- W2047955326 hasConcept C75937256 @default.
- W2047955326 hasConcept C8010536 @default.
- W2047955326 hasConcept C87976508 @default.
- W2047955326 hasConcept C89395315 @default.
- W2047955326 hasConcept C97355855 @default.
- W2047955326 hasConceptScore W2047955326C111368507 @default.
- W2047955326 hasConceptScore W2047955326C113196181 @default.
- W2047955326 hasConceptScore W2047955326C121332964 @default.
- W2047955326 hasConceptScore W2047955326C127313418 @default.
- W2047955326 hasConceptScore W2047955326C140676511 @default.
- W2047955326 hasConceptScore W2047955326C147789679 @default.