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- W2048000512 abstract "While the semiconductor industry is following a very aggressive roadmap without a corresponding reduction in exposure wavelength, the role of resolution enhancement techniques like PSM and OPC is becoming more and more important. Mask making for these advanced techniques is one of the most crucial parts in making these techniques work. Mask inspection is one of the major challenges in the mask making process, as it is one of the most performance critical steps in the entire mask making process. Especially contact or OPC patterns show difficulties in die-to-database inspection as the CAD data asks for square corners. LPC is a mask enhancement technique improving image quality and CD linearity for laser pattern generators. The paper present the impact of Laser Proximity Correction on contact and line patterns of 0.18 micrometers generation. The LBM is used to characterize Cd uniformity improvement of the entire plate." @default.
- W2048000512 created "2016-06-24" @default.
- W2048000512 creator A5013441698 @default.
- W2048000512 creator A5016634900 @default.
- W2048000512 creator A5037744678 @default.
- W2048000512 creator A5051394053 @default.
- W2048000512 creator A5058705703 @default.
- W2048000512 creator A5062413148 @default.
- W2048000512 creator A5074754530 @default.
- W2048000512 creator A5080973266 @default.
- W2048000512 creator A5087212436 @default.
- W2048000512 date "2000-07-19" @default.
- W2048000512 modified "2023-09-23" @default.
- W2048000512 title "Impact of pattern proximity correction on die-to-database mask inspection" @default.
- W2048000512 doi "https://doi.org/10.1117/12.392071" @default.
- W2048000512 hasPublicationYear "2000" @default.
- W2048000512 type Work @default.
- W2048000512 sameAs 2048000512 @default.
- W2048000512 citedByCount "0" @default.
- W2048000512 crossrefType "proceedings-article" @default.
- W2048000512 hasAuthorship W2048000512A5013441698 @default.
- W2048000512 hasAuthorship W2048000512A5016634900 @default.
- W2048000512 hasAuthorship W2048000512A5037744678 @default.
- W2048000512 hasAuthorship W2048000512A5051394053 @default.
- W2048000512 hasAuthorship W2048000512A5058705703 @default.
- W2048000512 hasAuthorship W2048000512A5062413148 @default.
- W2048000512 hasAuthorship W2048000512A5074754530 @default.
- W2048000512 hasAuthorship W2048000512A5080973266 @default.
- W2048000512 hasAuthorship W2048000512A5087212436 @default.
- W2048000512 hasConcept C111106434 @default.
- W2048000512 hasConcept C111335779 @default.
- W2048000512 hasConcept C111919701 @default.
- W2048000512 hasConcept C120665830 @default.
- W2048000512 hasConcept C121332964 @default.
- W2048000512 hasConcept C127413603 @default.
- W2048000512 hasConcept C192562407 @default.
- W2048000512 hasConcept C194789388 @default.
- W2048000512 hasConcept C199639397 @default.
- W2048000512 hasConcept C24326235 @default.
- W2048000512 hasConcept C2524010 @default.
- W2048000512 hasConcept C33923547 @default.
- W2048000512 hasConcept C41008148 @default.
- W2048000512 hasConcept C520434653 @default.
- W2048000512 hasConcept C77170095 @default.
- W2048000512 hasConcept C78371743 @default.
- W2048000512 hasConcept C98045186 @default.
- W2048000512 hasConceptScore W2048000512C111106434 @default.
- W2048000512 hasConceptScore W2048000512C111335779 @default.
- W2048000512 hasConceptScore W2048000512C111919701 @default.
- W2048000512 hasConceptScore W2048000512C120665830 @default.
- W2048000512 hasConceptScore W2048000512C121332964 @default.
- W2048000512 hasConceptScore W2048000512C127413603 @default.
- W2048000512 hasConceptScore W2048000512C192562407 @default.
- W2048000512 hasConceptScore W2048000512C194789388 @default.
- W2048000512 hasConceptScore W2048000512C199639397 @default.
- W2048000512 hasConceptScore W2048000512C24326235 @default.
- W2048000512 hasConceptScore W2048000512C2524010 @default.
- W2048000512 hasConceptScore W2048000512C33923547 @default.
- W2048000512 hasConceptScore W2048000512C41008148 @default.
- W2048000512 hasConceptScore W2048000512C520434653 @default.
- W2048000512 hasConceptScore W2048000512C77170095 @default.
- W2048000512 hasConceptScore W2048000512C78371743 @default.
- W2048000512 hasConceptScore W2048000512C98045186 @default.
- W2048000512 hasLocation W20480005121 @default.
- W2048000512 hasOpenAccess W2048000512 @default.
- W2048000512 hasPrimaryLocation W20480005121 @default.
- W2048000512 hasRelatedWork W2011727045 @default.
- W2048000512 hasRelatedWork W2334097940 @default.
- W2048000512 hasRelatedWork W2360835706 @default.
- W2048000512 hasRelatedWork W2368364587 @default.
- W2048000512 hasRelatedWork W2370335672 @default.
- W2048000512 hasRelatedWork W2374641660 @default.
- W2048000512 hasRelatedWork W2375007741 @default.
- W2048000512 hasRelatedWork W2378814372 @default.
- W2048000512 hasRelatedWork W2386407866 @default.
- W2048000512 hasRelatedWork W2391093542 @default.
- W2048000512 isParatext "false" @default.
- W2048000512 isRetracted "false" @default.
- W2048000512 magId "2048000512" @default.
- W2048000512 workType "article" @default.