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- W2048013577 abstract "In this work, the phase formation is compared for Ni- and Co-silicidation with and without Ti cap. In addition, the electrical performance of Ni-silicidation with and without Ti-cap is investigated and compared to the performance of a Co-silicidation process with a Ti cap that has the same Si consumption. The lateral confinement of the silicide in the active areas is also studied." @default.
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- W2048013577 date "2000-01-01" @default.
- W2048013577 modified "2023-10-17" @default.
- W2048013577 title "Comparative study of Ni-silicide and Co-silicide for sub 0.25-μm technologies" @default.
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- W2048013577 doi "https://doi.org/10.1016/s0167-9317(99)00270-1" @default.
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