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• W2048117855 abstract "Laser ablation of alumina (Al₂O₃), aluminum nitride (AIN) and silicon nitride (Si₃N₄) ceramics by 6 ns Nd:YAG laser operating at wavelengths of 1064 nm, 532 nm and 355 nm is studied. For all materials the maximum ablation rate is observed at wavelength 1064 nm, and the smallest one for irradiation at 532 nm in the case of Si3N4 and AIN. The numerical model, based on the heat-transfer equation describes the temperature distribution in the material and the evaporation process. The calculated depths of the drilled holes are in agreement with experiment." @default.
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• W2048117855 date "2003-11-07" @default.
• W2048117855 modified "2023-10-12" @default.
• W2048117855 title "<title>Ablation of ceramics with ultraviolet, visible, and infrared nanosecond laser pulses</title>" @default.
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• W2048117855 doi "https://doi.org/10.1117/12.515847" @default.
• W2048117855 hasPublicationYear "2003" @default.
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